KN Series oil diffusion pump

SUCTION CAPACITY:3100L/S TO 110000L/S
VACUUM RANGE:5x10-5 PA ABS


Z series oil ejector booster pump

SUCTION CAPACITY:2400L/S TO 36000L/S
VACUUM RANGE:5x10-3 PA ABS


KT Series Oil Diffusion Pump

SUCTION CAPACITY:1750L/S TO 130000L/S
VACUUM RANGE:TO 5x10-5 PA ABS


Diffusion Pump Oil

SATURATION VAPOR PRESSURE:5.0×10-9/5.0×10-9
LIMITING VACUUM:1.0×10-8/5.0×10-9

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