Why do semiconductor equipment and materials require leak detection

How to apply helium mass spectrometer leak detector to semiconductors, and why are semiconductor equipment and materials required for leak detection?

1. Semiconductor equipment requires high vacuum, such as magnetron sputtering stations, electron beam evaporation stations, ICP, PECVD and other equipment. Presenting leaks can lead to the inability to achieve high vacuum or require a large amount of time, which is time-consuming and labor-intensive;

2. High cleanliness and minimal water vapor in high vacuum environments. Once dust and suspended particles or dust in the surrounding environment are leaked, they will contaminate the crystal element, change the characteristics of the semiconductor, and damage its performance. Therefore, helium mass spectrometry leak detection must be carried out during the production process of semiconductor equipment;

3. Some semiconductor equipment requires the use of toxic or corrosive special gases. After helium mass spectrometry leak detection, these gases are not easily leaked under low leakage rate vacuum conditions. The equipment can timely extract unreacted gases and gaseous reaction products, ensuring the safety of workers and atmospheric environment.

4. Chip packaging, once leakage occurs, the chip will fail. Semiconductor manufacturing requires an extremely clean environment to ensure that the product is not affected by air pollution or disturbance during the production process. Therefore, the demand for a clean vacuum environment becomes inevitable.

Semiconductor equipment leak detection method: According to the characteristics of the product to be leak detected, vacuum method can be selected for leak detection. Set the leak rate value, connect the leak detector directly to the component to be leak detected, and the leak detector will draw the gas inside the component to a certain vacuum degree. Then, helium gas is blown onto the outer surface of the component through a spray gun The helium mass spectrometer leak detector can intuitively locate the leak point, and is designed ergonomically with strong mobility, fully complying with regulations!