Helium detection of semiconductor gas filter

Semiconductor gas filters, also known as semiconductor gas filters or semiconductor AMC (air molecule pollution) filters, are a type of filter specifically used in the semiconductor manufacturing industry. It is mainly used to remove various chemical pollutants that have a negative impact on semiconductor factories, such as organic matter, alkali, acidic gases, etc.

Helium detection of semiconductor gas filter

The working principle of semiconductor gas filters is mainly based on physical and chemical adsorption and decomposition processes, selectively removing harmful gases through the use of various adsorbents and catalysts. In terms of product types, semiconductor AMC filters can be divided into chemical adsorption filters (such as activated carbon or alumina) and adhesive media panels (such as activated carbon forming a single panel).

Helium mass spectrometer leak detector for semiconductor gas filters

(helium mass spectrometer leak detector for semiconductor gas filters)

Semiconductor gas filters are widely used in fields such as semiconductor manufacturing, optoelectronics, and flat panel displays, providing high-quality gas filtration solutions for these industries. Its main components include the filter housing and filter element. The mainstream shell materials include 316L stainless steel, nickel, PTFE material, Hastelloy alloy, etc., while the filter media are generally polypropylene, glass fiber, polyether sulfone, PTFE, polyvinylidene fluoride, nylon, UPE, etc.

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