Oil sealed mechanical pumps are not suitable for discharging gases containing a large amount of water vapor. Water vapor will condense saltwater droplets during the compression process and mix with pump oil to form a suspension. This not only reduces vacuum, but also causes rust and damage to the sealing surface of the pump chamber and rotor.
The preventive measures are as follows:
① Use an oil sealed mechanical pump with an air compression device. When the pump temperature is between 70 ℃ and 80 ℃, gas with a partial pressure of 1x 103Pa flash and 4x 103Pa can be extracted.
② Install an oil separator, centrifugal separator, or oil-water separator to treat mechanical pump oil mixed with water, and then the treated oil flows into the pump for use.
③ Use strong desiccants such as phosphorus pentoxide, alumina, calcium chloride, and molecular sieves to create traps to absorb water vapor.
④ The use of a front stage adsorption trap not only effectively adsorbs water vapor, but also prevents the mechanical pump oil from flowing back into the high vacuum chamber.
The first two methods are typically used in industry, while the latter two methods are typically used in laboratories and small exhaust systems.
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