Internal leakage of the vacuum pump unit is a very troublesome thing, and this problem is not easy to find, which will have a significant impact on the normal use of the unit equipment. Therefore, we must learn to judge whether there is internal leakage.
If the vacuum pump unit has internal leakage, it mainly occurs on the equipment with water-cooled jacket. At this time, if there is no doubt about the external leakage, we should pay attention to whether there is an obvious low pumping speed of the mechanical pump. There is also a low indication value of the vacuum gauge. In addition, if the mechanical pump oil is found to be emulsified quickly, there is also obvious corrosion of iron based parts in the vacuum chamber, If the above situations occur, the basic judgment is that there is no doubt of internal leakage.
When the unit has internal leakage, what we need to do is to clean its inner wall, and then pass cooling water to see if it has a wet point, which is what we call the leakage point. If there are small leaks and micro leaks, it is difficult to check. At this time, our common method is to detect the leakage of the ionization tube by making it sensitive to some gases under the high vacuum state. However, we must be patient with this method of leak detection. Good thing is that after repeated confirmation, we can also confirm our leak points.
If there is a large leakage point in the unit, we can use the flame method at this time to directly use the offset of the flame to find our leakage point.
So you can regularly check the vacuum pump unit to find out whether there is internal leakage in the unit equipment and also check whether there are other problems in the unit, so that you can find and repair them in time.
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