CCD series electric ultra-high vacuum gate valve

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Description: CCD series electric ultra-high vacuum gate valve
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Applicable range (Pa) 105~1.3×10-7
Gas leakage rate (Pa.L/S) ≤1.3×10-7
≤1.3×10-7
Valve”s roasting temperature(℃) ≤150(Except the drive device)
Pressure difference when opening the valve”s plates (Pa) ≤3×103
Power supply pressure AC220V/50Hz
On or off time S ≤50

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