Brand: EVP
Classification: Socket board Valves
Availability : In Stock
CCD series electric ultra-high vacuum gate valve
| Applicable range (Pa) | 105～1.3×10-7 |
| Gas leakage rate (Pa.L/S) | ≤1.3×10-7 |
| ≤1.3×10-7 | |
| Valve”s roasting temperature（℃） | ≤150(Except the drive device) |
| Pressure difference when opening the valve”s plates (Pa) | ≤3×103 |
| Power supply pressure | AC220V/50Hz |
| On or off time S | ≤50 |
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