Introduction:
Cryogenic vacuum pump (also known as cryopump, cooling pumps or condensation pumps) is a type of oil-free high-vacuum acquiring equipment classified as accumulation vacuum pump, taking advantage of low-temperature condensation & absorption.
Advantage:
1. High ultimate vacuum, extremely high vacuum up to 10^-7
2. Low operating costs. Taking diffusion pumps as an example, cryogenic pumps can save a lot of intermediate consumables (such as liquid ammonia maintenance costs) and also greatly reduce energy consumption.
3. High pumping speed. It has a very high pumping speed for air, especially water vapor.
4. Real cleaning. It uses a low-temperature cold plate to condense and adsorb gas to obtain and maintain a vacuum. There are no moving parts in the vacuum.
5. Safe and convenient. There are no moving parts in the vacuum chamber, and external interference or particles in the vacuum system will not affect the work of the cryopump. There is no installation direction requirement for cryogenic pumps
6. Long life. Because cryopumps have fewer moving parts and run at low speeds. Through routine maintenance, the service life of the cryogenic pump can reach 50,000 to 60,000 hours, or even more than 80,000 hours.
Application:
As one of the key equipment of integrated circuits, cryogenic pumps are widely used in the manufacturing process of semiconductors, integrated circuits and optoelectronic devices. Cryogenic pumps are also used in various coating equipment and vacuum application equipment.
| Model Model | ECP160 | ECP200 | ECP250 | ECP300 | ECP400 | ECP500 | ECP550 | ECP630 | |
| Flow Rate (L/s) | N2 | 1,000 | 1,700 | 2,500 | 4,000 | 5,500 | 10,000 | 15,000 | 16,000 |
| H2 | 1,700 | 2,700 | 3,600 | 5,000 | 10,000 | 18,000 | 25,000 | 30,000 | |
| Ar | 620 | 1,400 | 2,000 | 3,500 | 4,200 | 8,400 | 14,000 | 14,500 | |
| H2O | 25,50 | 4,000 | 6,900 | 9,500 | 16,000 | 29,000 | 39,000 | 43,000 | |
| Ultimate Vacuum( Pa) | 1×10-7 | 1×10-7 | 1×10-7 | 1×10-7 | 1×10-7 | 1×10-7 | 1×10-7 | 1×10-7 | |
| Maximum Throughput
(Pa ·L/s) |
Ar | 1.2×103 |
1.2×10^3 |
1.2×10^3 | 2×10^3 | 1.4×10^3 | 1. 1×10^3 | 4. 1×103 | 2.6×10^3 |
| Pumping
Capacity (Pa ·L) |
Ar | 5.6×10^
7 |
1.0×10^
8 |
1.0×10^8 | 2. 1×10^8 | 4.3×10^8 | 5.8×10^8 | 8. 1×10^8 | 6.5×10^8 |
| H2 | 8.0×104 | 1.0×10^5 | 6.7×10^5 | 1.0×10^6 | 2.4×10^6 | 4.6×10^6 | 8.5×10^6 | 1.2×10^6 | |
| Cool down Time (min) | ≤80 | ≤110 | ≤120 | ≤90 | ≤120 | ≤150 | ≤180 | ≤150 | |
| Mounting Flange
(customized according to user requirements) |
ANSI / ISO / UVG | ISO | |||||||
| Weight of Cryopump (KG) | 25 | 33 | 37 | 48 | 75 | 86 | 98 | 240 | |
| Match Compressor model | HC50W | HC50W | HC80W | HC80W | HC80W | HC100W | HC100W | HC80W×2 | |
| Model Model | ECP720 | ECP750 | ECP800 | ECP900 | ECP1000 | ECP1250 | ECP1320 | |
| Flow Rate (L/s) | N2 |
21,000 |
22,500 |
26,000 |
32,000 |
40,000 |
57,000 |
62,000 |
| H2 |
39,000 |
42,000 |
46,000 |
48,000 |
56,000 |
60,000 |
65,000 |
|
| Ar |
19,000 |
20,500 |
23,500 |
28,000 |
35,000 |
47,000 |
51,000 |
|
| H2O |
57,000 |
62,000 |
71,000 |
90,000 |
110,000 |
180,000 |
195,000 |
|
| Ultimate Vacuum ( Pa) | 1×10-7 | 1×10-7 | 1×10-7 | 1×10-7 | 1×10-7 | 1×10-7 | 1×10-7 | |
| Maximum Throughput
(Pa ·L/s) |
Ar | 2.6×10^3 | 2.6×10^3 | 2.7×10^3 | 2.8×10^3 | 2.9×10^3 | 3.0×10^3 | 3.2×10^3 |
| Pumping
Capacity (Pa ·L) |
Ar | 6.5×10^8 | 6.5×10^8 | 6.5×10^8 | 5×10^8 | 6.5×10^8 | 9×10^8 | 9.7×10^8 |
| H2 | 1.2×10^6 | 1.2×10^6 | 1.2×10^6 | 1.0×10^7 | 1.4×10^7 | 1.5×10^7 | 1.6×10^7 | |
| Cool down Time (min) | ≤180 | ≤220 | ≤240 | ≤180 | ≤240 | ≤220 | ≤240 | |
| Mounting Flange
(customized according to user requirements) |
UVG/ISO | ISO | ISO-F | |||||
| Weight of Cryopump (KG) | 250 | 260 | 265 | 275 | 290 | 380 | 420 | |
| Match Compressor model | HC100W×2 | HC100W×4 | ||||||
Remark: Scope of supply: pump, compressor, temperature controller, helium tube (3m), drive line.
If possible, kindly suggest please your working industry/process, working pressure, working medium, etc. Given detailed request helps to gain better-matched customized solution. Thanks for your patience.
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