DZB series cryogenic pump

Availability :
In Stock
Description: Low-temperature vacuum pump (also known as cryogenic pumps, cooling pumps or condensation pumps) 
Email : contact@evpvacuum.com(your request will be responsed within 1 hour.)
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Introduction:

Cryogenic  vacuum  pump  (also  known  as  cryopump, cooling  pumps or condensation pumps) is a type of oil-free high-vacuum acquiring equipment classified as accumulation vacuum pump, taking advantage of low-temperature condensation & absorption.

Advantage:

1. High ultimate vacuum, extremely high vacuum up to 10^-7

2. Low operating costs. Taking diffusion pumps as an example, cryogenic pumps can save a lot of intermediate consumables (such as liquid ammonia maintenance costs) and also greatly reduce energy consumption.

3. High pumping speed. It has a very high pumping speed for air, especially water vapor.

4. Real cleaning. It uses a low-temperature cold plate to condense and adsorb gas to obtain and maintain a vacuum. There are no moving parts in the vacuum.

5. Safe and convenient. There are no moving parts in the vacuum chamber, and external interference or particles in the vacuum system will not affect the work of the cryopump. There is no installation direction requirement for cryogenic pumps

6. Long life. Because cryopumps have fewer moving parts and run at low speeds. Through routine maintenance, the service life of the cryogenic pump can reach 50,000 to 60,000 hours, or even more than 80,000 hours.

Application:

As one of the key equipment of integrated circuits, cryogenic pumps are widely used in the manufacturing process of semiconductors, integrated circuits and optoelectronic devices. Cryogenic pumps are also used in various coating equipment and vacuum application equipment.

Model Model DZB160 DZB200 DZB250 DZB300 DZB400 DZB500 DZB550 DZB630
Flow Rate (L/s) N2 1,000 1,700 2,500 4,000 5,500 10,000 15,000 16,000
H2 1,700 2,700 3,600 5,000 10,000 18,000 25,000 30,000
Ar 620 1,400 2,000 3,500 4,200 8,400 14,000 14,500
H2O 25,50 4,000 6,900 9,500 16,000 29,000 39,000 43,000
Ultimate Vacuum( Pa) 1×10-7 1×10-7 1×10-7 1×10-7 1×10-7 1×10-7 1×10-7 1×10-7
Maximum Throughput

(Pa ·L/s)

Ar 1.2×103  

1.2×10^3

1.2×10^3 2×10^3 1.4×10^3 1. 1×10^3 4. 1×103 2.6×10^3
Pumping

Capacity (Pa ·L)

Ar 5.6×10^

7

1.0×10^

8

1.0×10^8 2. 1×10^8 4.3×10^8 5.8×10^8 8. 1×10^8 6.5×10^8
H2 8.0×104 1.0×10^5 6.7×10^5 1.0×10^6 2.4×10^6 4.6×10^6 8.5×10^6 1.2×10^6
Cool down Time (min) ≤80 ≤110 ≤120 ≤90 ≤120 ≤150 ≤180 ≤150
Mounting Flange

(customized according to user requirements)

ANSI / ISO / UVG ISO
Weight of Cryopump (KG) 25 33 37 48 75 86 98 240
Match Compressor model HC50W HC50W HC80W HC80W HC80W HC100W HC100W HC80W×2

 

 

Model Model DZB720 DZB750 DZB800 DZB900 DZB1000 DZB1250 DZB1320
Flow Rate (L/s) N2  

21,000

 

22,500

 

26,000

 

32,000

 

40,000

 

57,000

 

62,000

H2  

39,000

 

42,000

 

46,000

 

48,000

 

56,000

 

60,000

 

65,000

Ar  

19,000

 

20,500

 

23,500

 

28,000

 

35,000

 

47,000

 

51,000

H2O  

57,000

 

62,000

 

71,000

 

90,000

 

110,000

 

180,000

 

195,000

Ultimate Vacuum ( Pa) 1×10-7 1×10-7 1×10-7 1×10-7 1×10-7 1×10-7 1×10-7
Maximum Throughput

(Pa ·L/s)

Ar 2.6×10^3 2.6×10^3 2.7×10^3 2.8×10^3 2.9×10^3 3.0×10^3 3.2×10^3
Pumping

Capacity (Pa ·L)

Ar 6.5×10^8 6.5×10^8 6.5×10^8 5×10^8 6.5×10^8 9×10^8 9.7×10^8
H2 1.2×10^6 1.2×10^6 1.2×10^6 1.0×10^7 1.4×10^7 1.5×10^7 1.6×10^7
Cool down Time (min) ≤180 ≤220 ≤240 ≤180 ≤240 ≤220 ≤240
Mounting Flange

(customized according to user requirements)

UVG/ISO ISO ISO-F
Weight of Cryopump (KG) 250 260 265 275 290 380 420
Match Compressor model HC100W×2 HC100W×4

 

Remark: Scope of supply: pump, compressor, temperature controller, helium tube (3m), drive line.

Contact us

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