EVP

EMP Hybrid molecular pump Turbo molecular pump

Brand: EVP

Classification: Dry Type Oilless Vacuum Pumps

SUCTION CAPACITY: 600L/S TO 3600L/S

VACUUM RANGE: 8×10-8PA

Availability : In Stock

EMP series molecular pump can obtain clean and ultra-high vacuum pressure without cold trap and oil baffle.

CONTACT US FOR MORE INFORMATION

EMP series grease-lubricated pump

Model

Unit

EMP-80

EMP-300(Y)

EMP-650

EMP-700(Y)

EMP-1300(Y)

EMP-2000(Y)

EMP-4500(Y)

Inlet DIA

mm

63CF

63ISO-K

100CF

100ISO-K

160CF

160ISO-K

160CF

160ISO-K

200CF

200ISO-K

250CF

250ISO-K

400ISO-K

320ISO-F

Outlet DIA

mm

16KF

25KF

40KF

40KF

40KF

40KF

40KF

Flow rate

L/s

80

300

650

700

1300

2000

4500

Compressionration

N2

>109

>108

>109

>109

>109

>109

>109

H2

>103

>1×103

>1×103

>1×103

>1×103

>1×103

>1×104

Ultimate vacuum

Pa

<2×10-6

<3×10-7

<6×10-7

<1.2×10-7

<5×10-7

<1.2×10-7

<5×10-7

<1.2×10-7

<5×10-7

<1.2×10-7

<5× 10-7

<5×10-7

Rotary Speed

rpm

60000

33000

24000

27000

24000

24000

21000

Bearing

Magnetic
bearing

Grease lubricated ceramic bearing

Vibration value

µm

≤0.1

≤0.1

≤0.1

≤0.1

≤0.1

≤0.1

≤0.1

Start-up time

min

<2

<4

<4.5

<4.5

<5

<6

<15

Fore vacuum pump flow rate

L/s

0.5-2

2

4-8

4-8

8-15

8-15

25

Cooling method

/

Water/Air

Water/Air

Water/Air

Water/Air

Water/Air

Water/Air

Water

Ambient temperature
(Air)

≤25

≤25

≤25

≤25

≤25

≤25

≤25

Cooling water

Temperature

/

≤20

≤20

≤20

≤20

≤20

≤20

Consumption

L/min

/

1

1

1

1

1

1

Mounting
position

/

Any

Any

Any

Any

Any

Any

Any

Weight

kg

4.7/2.5

12

24

24

29(34)

31(36)

80

Others

/

With
Integrated
controller

With electrical controller & 5 m cables

Introduction:

EMP series molecular pump can obtain clean and ultra-high vacuum pressure without cold trap and oil baffle. EVP can provide three types of molecular pump with distinguished structure as, hybrid molecular pump, turbo molecular pump, and grease lubricated hybrid molecular pump.

Advantage:

High pumping speed and compression ration

Being no critical and with no memory effect to pumped gas

With clean and high (ultra-high) vacuum without cooling trap and oil flap

High intensity for vane, high stability and long lifetime

Light rotor

Short start-up time

Low mechanical consumption

Application:

EMP series molecular vacuum pump has widely used in laboratory, instruments analysis, laser application,  vacuum  coating  sputtering,  semiconductor   manufacturing  equipment,  vacuum degassing, lighting, photovoltaic, aerospace, vacuum drying etc.

Contact us

If possible, kindly suggest please your working industry/process, working pressure, working medium, etc. Given detailed request helps to gain better-matched customized solution. Thanks for your patience.

your request will be responsed within 3 hours, kindly pay attention to your email please.

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