EVP

EMP Hybrid molecular pump Turbo molecular pump

Brand: EVP

Classification: Dry Type Oilless Vacuum Pumps

SUCTION CAPACITY: 600L/S TO 3600L/S

VACUUM RANGE: 8×10-8PA

Availability : In Stock

EMP series molecular pump can obtain clean and ultra-high vacuum pressure without cold trap and oil baffle.

CONTACT US FOR MORE INFORMATION

EMP series Hybrid molecular pump & turbo molecular pump

Model Unit EMP-600 EMP- 1200 EMP- 1600 EMP-3600 EMP-4000
Inlet flange mm 150CF 160ISO-K 200CF 200ISO-K

250CF

250ISO-K 400 ISO-K 400 ISO-K
Outlet flange mm 40 KF 40 KF 50 KF 100 ISO-K 100 ISO-K
Flow rate L/s 600 1200 1600 3600 4000
Compression ration N2 >109 >109 >109 >108 >108
H2 >8× 103 >1× 104 >1× 104 >5× 102 >5× 102
Ultimate vacuum Pa <8× 10-8

<5× 10-7

<8× 10-8 <5× 10-7 <8× 10-8 <5× 10-7 <2× 10-6 <2× 10-6
Rotary Speed rpm 24000 27000 27000 13500 15000
Vibration value µm ≤0.1 ≤0.1 ≤0.15 ≤0.15 ≤0.15
Start-up time min <4.5 <5 <6 <14 <18
Fore vacuum pump flow rate L/s 4-8 8- 15 15 30-70 30-70
Cooling method / Air / Water Air / Water Air / Water Water Water
Ambient     temperature(Air) ≤35 ≤35 ≤35 ≤35 ≤35
Cooling water temperature ≤25 ≤25 ≤25 ≤25 ≤25
consumption L/min 1-2 1-2 1-2 2 2
Mounting
position
/ Vertical ±5 ° Vertical ±5 ° Vertical ±5 ° Vertical±5 ° Vertical±5 °
Weight Kg 25 29 31 100 100
Others / With electrical controller & 5 m cables

 

Introduction:

EMP series molecular pump can obtain clean and ultra-high vacuum pressure without cold trap and oil baffle. EVP can provide three types of molecular pump with distinguished structure as, hybrid molecular pump, turbo molecular pump, and grease lubricated hybrid molecular pump.

Advantage:

High pumping speed and compression ration

Being no critical and with no memory effect to pumped gas

With clean and high (ultra-high) vacuum without cooling trap and oil flap

High intensity for vane, high stability and long lifetime

Light rotor

Short start-up time

Low mechanical consumption

Application:

EMP series molecular vacuum pump has widely used in laboratory, instruments analysis, laser application,  vacuum  coating  sputtering,  semiconductor   manufacturing  equipment,  vacuum degassing, lighting, photovoltaic, aerospace, vacuum drying etc.

Contact us

If possible, kindly suggest please your working industry/process, working pressure, working medium, etc. Given detailed request helps to gain better-matched customized solution. Thanks for your patience.

your request will be responsed within 3 hours, kindly pay attention to your email please.

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EMP Hybrid molecular pump Turbo molecular pump

SUCTION CAPACITY: 600L/S TO 3600L/S
VACUUM RANGE: 8×10-8PA