EVP Series Sputtering Ion Pump

Main Applications：

EVP Series Sputtering Ion Pump products are specially designed for ultra-high vacuum users, which can be widely used in various ultra-high vacuum scientific research equipment and industrial equipment.

The industries involved are instruments, particle accelerators, synchrotron radiation sources, high-power laser research, Surface physics, materials science, space simulation, electron microscope, mass spectrometer, communication, vacuum calibration, vacuum smelting,   vacuum coating, semiconductor application equipment, vacuum electronics, medical and other industries.

Advantage：

1.The structure of EVP series Sputtering Ion Pump adopts simulation and optimized design, and has a pumping capacity of not less than 85% of the nominal pumping speed under the   vacuum condition of 1×10-7pa.

2.In the extremely high vacuum (XHV) region, the Sputtering Ion Pump still has a large pumping capacity. Use a testing device that meets national testing standards to get a minimum testing pressure of 3.6×10 – 10 Pa. With the optimized design of the high-end SIP400A sputtering ion pump, the lower limit of the extreme pressure test has entered 10- 11Pa.

3.High-quality raw materials, such as special insulation materials, which are resistant to high voltage and high temperature.

4.The entire pump uses a special anti-corrosion coating, which enables the ion pump to remove various corrosive gases, can withstand high temperatures, and prolong the service life of the pump in harsh environments.