1. Film production equipment, scientific engineering, chemical analysis equipment, etc.
2. Oil-free systems like semiconductor equipment
3. Backing pump as molecular pumps
4. Medical equipment, biological products, pharmaceutical equipment, etc.
5. Food, medicine and other packaging equipment
6. Special gas recovery, liquid crystal injection equipment
1. Absolutely no oil, totally clean vacuum environment can be obtained
2. Low noise, <52 dB(A)
3.light corrosion resistance, can pump alcohol, harmful / toxic gas, organic solvents
4.Leakage rate < 1×10-7 pa.m3 /s (for special gas can reach to 1×10-8pa.m3 /s)
5.Small size, light weight, strong adaptability
6.Gas will not touch pump’s bearing, bearing can have a longer service time
7.Input power is 220V, 50Hz, voltage can be converted by mainboard
8.Can automatically stabilize by its frequency conversion to needed vacuum
9.The same inlet / outlet size as Edwards 10i / 20i, can directly replace