EVP Series Sputtering Ion Pump
SUCTION CAPACITY:12L/S TO 1000L/S
VACUUM RANGE: 2X10-9PA
SUCTION CAPACITY: 27M3/H TO 500M3/H
VACUUM RANGE: TO 33MBAR ABS
SUCTION CAPACITY:4.4L/S TO 16.6L/S
VACUUM RANGE:1PA ABS
SUCTION CAPACITY:250M3/H TO 1440M3/H
VACUUM RANGE:0.02MBAR ABS
SUCTION CAPACITY:180M3/H TO 850M3/H
VACUUM RANGE:0.02MBAR ABS