Main Applications：
It is used widely in Semiconductor Industry, Pharmaceutical industry, vacuum packing and scientific and chemical analysis.
It can work well with below:
1.Photovoltaic production line
2.Lithium battery manufacturing process
3.Freezer dryer
4.Film preparation equipment
5.As backing pump of molecular pump.
6. Used for scientific and chemical analysis;
7. An aux.pump in oil-free pumping system;
8. Used in enclosing room in sem-conductor fab. equipments;
9. An aux.pump in electron miscrope;
10. Used in Ic equipment
Technical Features：
Invulnerable to exterior dust contamination;
Interior oil-free, clean vacuum assured;
Smooth running, low noise;
Water cooling unneeded, corrosion-proof;
Easy operation, low maintenance expense;
Advantage：
1.EVP are designed by reference of the design of Edwards, Varian, Iwata.
2.Same seal & gasket of Japan Anest Iwata.
3.Fast delivery, we have pump in stock.
Technical Data :
| Item | Technical Specifications | ||
| Model | EVP-300 | EVP-600 | EVP-1000 |
| Nominal capacity | 4.4 L/s | 8.8 L/s | 16.6 L/s |
| Ultimate pressure | ≤ 3Pa | ≤ 3Pa | ≤ 1Pa |
| Leak rate | 1X10-6 Pa.m3/S (for special gas can reach to 1X10-8Pa.m3/S) | ||
| Water vapor
treatment capacity (gas ballast open) |
25g/day |
25g/day |
25g/day |
| Motor Data | 0.55KW | 0.75KW | 1.5KW |
| Rotary speed | 1450rpm (50Hz) | 1450rpm (50Hz) | 1450rpm (50Hz) |
| Temperature | 5~40℃ | 5~40℃ | 5~40℃ |
| Noise | ＜65dB | ＜65dB | ＜68dB |
| Noise (gas ballast) | ＜70dB | ＜70dB | ＜74dB |
| Gas inlet
connecting flange |
KF25 | KF40 | KF40 |
| Gas outlet
connecting flange |
KF25 | KF25 | KF40 |
| Dimension
（LXWXH） |
470X270X364 (mm) | 490X340X370 (mm) | 560X390X420
(mm) |
| Weight | 35Kg | 44Kg | 64Kg |
If possible, kindly suggest please your working industry/process, working pressure, working medium, etc. Given detailed request helps to gain better-matched customized solution. Thanks for your patience.
your request will be responsed within 3 hours, kindly pay attention to your email please.
