EVP Series Dry Scroll Vacuum Pump

Availability :
In Stock
Description: Main Applications: Used for scientific and chemical analysis; An aux.pump in oil-free pumping system;
Email : contact@evpvacuum.com(your request will be responsed within 1 hour.)
Wechat : +86 13162688673
WhatsApp : +86 13162688673

Main Applications:

It is used widely in Semiconductor Industry, Pharmaceutical industry, vacuum packing and scientific and chemical analysis.

It can work well with below:

1.Photovoltaic production line

2.Lithium battery manufacturing process

3.Freezer dryer

4.Film preparation equipment

5.As backing pump of molecular pump.

6. Used for scientific and chemical analysis;

7. An aux.pump in oil-free pumping system;

8. Used in enclosing room in sem-conductor fab. equipments;

9. An aux.pump in electron miscrope;

10. Used in Ic equipment

Technical Features:

Invulnerable to exterior dust contamination;

Interior oil-free, clean vacuum assured;

Smooth running, low noise;

Water cooling unneeded, corrosion-proof;

Easy operation, low maintenance expense;


1.EVP are designed by reference of the design of Edwards, Varian, Iwata.

2.Same seal & gasket of Japan Anest Iwata.

3.Fast delivery, we have pump in stock.


Technical Data :

Item Technical Specifications
Model EVP-300 EVP-600 EVP-1000
Nominal capacity 4.4 L/s 8.8 L/s 16.6 L/s
Ultimate pressure ≤ 3Pa ≤ 3Pa ≤ 1Pa
Leak rate 1X10-6 Pa.m3/S (for special gas can reach to 1X10-8Pa.m3/S)
Water vapor

treatment capacity (gas ballast open)







Motor Data 0.55KW 0.75KW 1.5KW
Rotary speed 1450rpm (50Hz) 1450rpm (50Hz) 1450rpm (50Hz)
Temperature 5~40℃ 5~40℃ 5~40℃
Noise <65dB <65dB <68dB
Noise (gas ballast) <70dB <70dB <74dB
Gas inlet

connecting flange

KF25 KF40 KF40
Gas outlet

connecting flange

KF25 KF25 KF40


470X270X364 (mm) 490X340X370 (mm) 560X390X420


Weight 35Kg 44Kg 64Kg

Contact us

If possible, kindly suggest please your working industry/process, working pressure, working medium, etc. Given detailed request helps to gain better-matched customized solution. Thanks for your patience.

your request will be responsed within 3 hours, kindly pay attention to your email please.