Main Applications：
Used for scientific and chemical analysis;
An aux.pump in oil-free pumping system;
Used in enclosing room in sem-conductor fab. equipments;
An aux.pump in electron miscrope;
Used in Ic equipment
Technical Features：
Invulnerable to exterior dust contamination;
Interior oil-free, clean vacuum assured;
Smooth running, low noise;
Water cooling unneeded, corrosion-proof;
Easy operation, low maintenance expense;
Performance curve:
Technical Data :
| Item | Technical Specifications | |||||
| Model | EVP-300 | EVP-600 | EVP-1000 | |||
|
Capacity |
50 hz |
l/s | 4 | 8 | 16 | |
| l/min | 240 | 480 | 960 | |||
| m3/h | 14.4 | 28.8 | 57.6 | |||
| CFM | 8.5 | 17.1 | 34.2 | |||
|
60 hz |
l/s | 4.8 | 9.6 | 19.2 | ||
| l/min | 288 | 576 | 1152 | |||
| m3/h | 17.3 | 34.6 | 69.12 | |||
| CFM | 10.3 | 20.6 | 41.1 | |||
| Ultimate pressure | pa | ≤ 3 | ≤ 3 | ≤ 1 | ||
| Leak rate | Pa.m3/S | 1X10-6 (for special gas can reach to 1X10-8) | ||||
| Water vapor
treatment capacity (gas ballast open) |
day |
25g/day |
25g/day |
25g/day |
||
| Motor Data | KW | 0.55KW | 0.75KW | 1.5KW | ||
| Rotary speed | rpm | 1450(50hz);1740(60hz) | ||||
| Temperature | ℃ | 5~40℃ | 5~40℃ | 5~40℃ | ||
| Noise | dB | ＜65 | ＜65 | ＜68 | ||
| Noise (gas ballast) | dB | ＜70 | ＜70 | ＜74 | ||
| Gas inlet
connecting flange |
KF | KF25 | KF40 | KF40 | ||
| Gas outlet
connecting flange |
KF | KF25 | KF25 | KF40 | ||
| Dimension | mm | 470X270X364 | 490X340X370 | 560X390X420 | ||
| Weight | kg | 35Kg | 44Kg | 64Kg | ||
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