Main Applications：
Used for scientific and chemical analysis;
An aux.pump in oil-free pumping system;
Used in enclosing room in sem-conductor fab. equipments;
An aux.pump in electron miscrope;
Used in Ic equipment
Technical Features：
Invulnerable to exterior dust contamination;
Interior oil-free, clean vacuum assured;
Smooth running, low noise;
Water cooling unneeded, corrosion-proof;
Easy operation, low maintenance expense
Technical Data :
| Item | Technical Specifications | |||
| Model | EVP-150 | EVP-300 | EVP-600 | EVP-1000 |
| Nominal capacity | 2 L/s | 4 L/s | 8 L/s | 16 L/s |
| Ultimate pressure | ≤ 10Pa | ≤ 3Pa | ≤ 3Pa | ≤ 1Pa |
| Leak rate | 1X10-6 Pa.m3/S (for special gas can reach to 1X10-8Pa.m3/S) | |||
| Water vapor treatment capacity (gas ballast open) | 5g/day | 25g/day | 25g/day | 25g/day |
| Motor Data | 0.25KW | 0.55KW | 0.75KW | 1.5KW |
| Rotary speed | 1450rpm (50Hz) | 1450rpm (50Hz) | 1450rpm (50Hz) | 1450rpm (50Hz) |
| Temperature | 5~40℃ | 5~40℃ | 5~40℃ | 5~40℃ |
| Noise | ＜55dB | ＜65dB | ＜65dB | ＜68dB |
| Noise (gas ballast) | ＜60dB | ＜70dB | ＜70dB | ＜74dB |
| Gas inlet connecting flange | KF25 | KF25 | KF40 | KF40 |
| Gas outlet connecting flange | KF16 | KF25 | KF25 | KF40 |
| Dimension（LXWXH） | 380X210X270 (mm) | 470X270X364 (mm) | 490X340X370 (mm) | 560X390X420 (mm) |
| Weight | 16Kg | 35Kg | 44Kg | 64Kg |
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