Main Applications：
It is used widely in Semiconductor Industry, Pharmaceutical industry, vacuum packing and scientific and chemical analysis.
It can work well with below:
1.Photovoltaic production line
2.Lithium battery manufacturing process
3.Freezer dryer
4.Film preparation equipment
5.As backing pump of molecular pump.
6. Used for scientific and chemical analysis;
7. An aux.pump in oil-free pumping system;
8. Used in enclosing room in sem-conductor fab. equipments;
9. An aux.pump in electron miscrope;
10. Used in Ic equipment
Technical Features：
Invulnerable to exterior dust contamination;
Interior oil-free, clean vacuum assured;
Smooth running, low noise;
Water cooling unneeded, corrosion-proof;
Easy operation, low maintenance expense;
Advantage：
1.EVP are designed by reference of the design of Edwards, Varian, Iwata.
2.Same seal & gasket of Japan Anest Iwata.
3.Fast delivery, we have pump in stock.
Technical Data :
| Item | Technical Specifications （50hz） | |||
| Model | EVP-150 | EVP-300 | EVP-600 | EVP-1000 |
| Nominal capacity | 2 L/s | 4 L/s | 8 L/s | 16 L/s |
| Ultimate pressure | 10Pa | 3Pa | 3Pa | 3Pa |
| Water vapor treatment capacity (gas ballast open) | 5g/day | 25g/day | 25g/day | 25g/day |
| Motor Data | 0.25KW | 0.55KW | 0.75KW | 1.5KW |
| Rotary speed | 1450rpm | 1450rpm | 1450rpm | 1450rpm |
| Temperature | 5~40℃ | |||
| Noise | ＜55dB | ＜65dB | ＜65dB | ＜68dB |
| Noise (gas ballast) | ＜60dB | ＜70dB | ＜70dB | ＜74dB |
| Gas inlet | KF25 | KF25 | KF40 | KF40 |
| Gas outlet | KF16 | KF25 | KF25 | KF40 |
| Dimension | 380X210X270 | 470X270X364 | 490X340X370 | 560X390X420 |
| （LXWXH） | (mm) | |||
| Weight | 16Kg | 35Kg | 44Kg | 64Kg |
If possible, kindly suggest please your working industry/process, working pressure, working medium, etc. Given detailed request helps to gain better-matched customized solution. Thanks for your patience.
your request will be responsed within 3 hours, kindly pay attention to your email please.
