In the production of solenoid valve, the helium mass spectrometer leak detector is used more and more frequently with the user’s more and more strict requirements on the leakage of the solenoid valve. The following is to introduce the helium mass spectrometer leak detector for solenoid valve spool leak detection application.
Solenoid valve is a kind of industrial equipment controlled by electromagnetism. It is an automatic basic component used to control fluid. It belongs to actuator and is not limited to hydraulic and pneumatic. It is used to adjust the direction, flow, speed and other parameters of the medium in the industrial control system. Solenoid valve can cooperate with different circuits to achieve the desired control, and the control accuracy and flexibility can be guaranteed. There are many kinds of solenoid valves. Different solenoid valves play a role in different positions of the control system. The most commonly used are one-way valve, safety valve, direction control valve, speed control valve, etc.
1、 Leakage detection of solenoid valve core
As the gases used in semiconductor industry, such as silane, ammonia, etc., are toxic or corrosive gases, the leakage rate of valves and related components used is very strict. The final leakage rate of finished products is required to be less than 5-10 mbar L / s, which can only be achieved by helium mass spectrometer leak detector. Therefore, for the leakage detection of solenoid valve, helium mass spectrometer leak detector is the best choice!
2、 Operating instructions for leakage detection of solenoid valve spool
The general detection process is as follows: the incoming material is visually inspected with a magnifying glass, and then after the laser welding is completed. Finally, the helium mass spectrometer leak detector is used for the final detection. The leakage rate value is subject to the data measured by the helium leak detector.
This is because the helium mass spectrometer leak detector can meet such a high leakage rate test, and the data is reliable. In addition, it has the advantages of simple operation and high production efficiency.
3、 Leakage detection method of solenoid valve core negative pressure method
(1) connect the valve to the tooling to form a closed cavity, and then connect the leak detector to the tooling.
(2) start the helium mass spectrometer leak detector, the leak detector starts to extract the gas in the closed chamber, and displays a leakage rate value.
(3) spray helium on the laser weld and the suspected leakage place, and observe whether the leakage rate value on the leak detector changes.
(4) if the leakage rate increases, it indicates that there is leakage at the place where helium is injected, and the quality of the inspected object is unqualified. If the leakage rate value can meet the requirements, the tested object is qualified and the leakage detection is completed.