In addition to the typical cutting element vacuum technology and general technical requirements in the design of the product must be considered, the vacuum system valve is also bound by special request.
The minimum displaced ultimate pressure and the high flow resistance of components in the molecular flow range must be taken into consideration in configuring and selecting vacuum valves. In addition, the valve body and the valve seat requires minimal leakage rate. Lubricant valve vacuum side of the moving parts must be suitable for the required pressure and temperature range, or to avoid the whole high or ultrahigh vacuum (if possible).Minimum dead volumes and high conductivities are important, particularly in the molecular flow range.
The feedthrough for mechanical actuation elements must be designed in such a manner as to satisfy requirements with respect to tightness, as well as the pressure and temperature ranges. Depending on the quality, elastomer sealed feedthroughs (e.g. shaft seals) can be used for lower vacuum requirements in the pressure range greater than 1 · 10-4 hPa. While membran or spring bellows are used for pressure ranges of less than 1 · 10-4 hPa. In addition, if properly designed, then, with a metal bellows seal valve can bake. With elastomer seal housing, plate or flange valve for up to 1 · 10-8 hPa pressure. Installation is usually in a closed condition to the pressure acting on the valve plate of the way, thereby increasing closing force.
All-metal valves, wherein all of the seal member made of metal, suitable for UHV applications and higher baking temperatures, but they often require a higher closing force to seal. Soft metals (copper or special alloys) used as a sealing material. In addition to higher closing force, but also must take into account the short life of the seal.
There are various types of valves used for different applications in the field of vacuum technology; these valves in their design or function name.
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