Eliminate Oil Diffusion Pump System in Oil Vapor Backflow to Specific Measures

(1) Increase the starting power of the diffusion pump and shorten the pressure transition zone when the mechanical pump switches to the diffusion pump.

(2) Change the system operation process, and use valves to avoid the adverse flow danger zone (switching zone). For example, the high vacuum valve can be opened at a certain speed or gradually, so that the gas flow to the diffusion pump is lower than the maximum displacement. The mechanical pump pumping speed can ensure that the front end pressure can be set to operate the diffusion pump. So you can avoid the transition zone.

(3) Adjust the self-healing power of the diffusion pump to the optimal power to improve the working process and avoid the phenomenon of pump oil boiling. Backflow in diffusion pumps usually peaks during heating and shut down, so a high vacuum valve at the pump inlet can be used to control and avoid backflow.

(4) Add liquid hydrogen cold trap or adsorption trap at the inlet of diffusion pump to capture the flowing oil vapor.

(5) Use high-quality diffusion pump working fluid.

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