oil – free vortex vacuum pump
The vortex disk of the oil – free vortex vacuum pump is one or more involute helices connected one end to a plane to form a vortex disk. A pair of eddy disks composed of a static vortex disk and a moving vortex disk constitute the basic pumping unit of oil – free vortex vacuum pump. Driven by an eccentric shaft, the rotating disk and the rotating disk oscillate in relative motion to form a crescent vacuum chamber with constantly changing volume, so that the gas can be inhaled from the air outlet and discharged from the air outlet, completing the cycle of inhalation, compression and exhaust.
Features of oil-free vortex vacuum pump:
1. No oil, no friction, no contact, no wear and no particle dust pollution, and a clean vacuum can be obtained.
2. Large amount of gas extraction: the pumping volume of the pump with the same diameter is twice as large as that of the single stage, saving energy.
3. High pumping efficiency: with 3-4 pumping units, low pressure difference; The air and vacuum are sealed by type 0 ring, with low leakage.
4. Non-contact, good balance, low torque, low noise and low vibration.
5. The structure is simple and compact. Under the same size, the motion radius is small and the operation is stable.
6. Small size, convenient maintenance and low maintenance cost.
7. Air cooling, no water cooling.
Application fields of oil-free vortex vacuum pump:
1. Semiconductor industry: film preparation equipment, semiconductor device packaging equipment;
2. Scientific instrument industry: synchronous radiation beam line, electron microscope, analysis and testing instrument;
3. Mechanical equipment industry: material preparation equipment, vacuum testing, material purification equipment;
4. Chemical industry;
5. Medical equipment: dental instruments, dialysis machines, biological products and pharmaceutical preparation;
6. Packaging industry: food, medicine, biological products and other packaging equipment.
The oil – free vortex vacuum pump can solve the basic and common problems of the vacuum system, such as pollution and vibration.
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