pump for semiconductor processes

Semiconductor industry has been the pioneer of digitalization since its inception. It provides digital services and pursues new digital business model. The rapid development of AI application brings great chip demand and promotes the strong growth of semiconductor industry.

What is Semiconductor

Semiconductor is a material whose conductivity is between conductor and insulator at room temperature. Semiconductor is widely used in radio, television and temperature measurement. For example, a diode is a device made of semiconductors. Semiconductor is a material whose conductivity can be controlled from insulator to conductor. Semiconductors are of great importance in terms of both science and technology and economic development. Most of today’s electronic products, such as computers, mobile phones or digital recorders, have very close links with semiconductor. The common semiconductor materials are silicon, germanium, gallium arsenide and so on, and silicon is one of the most influential semiconductor materials in commercial applications.

The process flow of semiconductor products mainly includes wafer fabrication and packaging test. There are many processing procedures and complex materials required. Wafer production line can be divided into diffusion, photolithography, wet etching, ion implantation and other independent production areas; packaging and testing process can be divided into back thinning, wafer cutting, patch and other steps.

Silicon wafer is the basic material for manufacturing semiconductor chips. It is purified by silicon element. After a series of procedures, polycrystalline silicon is pulled out of single crystal silicon rod, and then the wafer is cut, polished and polished.

pump for semiconductor processes


Vacuum pump plays an important role in semiconductor manufacturing. In semiconductor production, gases are put into chambers to react and thin films are formed on the surface of silicon wafers. The function of the pump is to provide reliable low pressure in the chamber to facilitate the formation of the film.

In the fabrication process of silicon wafer, vacuum pump is mainly used for polishing, polishing and cleaning liquid collection of wafer. Considering the chemical characteristics of solution, vacuum pump made of polypropylene is mainly used. In the process section of semiconductor, vacuum pump is mainly used in wet etching and packaging testing.

EVP vacuum pump manufacturers provide one of the most comprehensive vacuum pump and system product portfolios for process applications in semiconductor manufacturing.

Drawing on their many years of experience, our specialists are ready to advise you on all areas of vacuum solutions within the fab ranging from load-lock applications to the harshest of process applications, as well as centralized fab vacuum systems. With our comprehensive vacuum pump portfolio, you will always find the most technically suitable and cost-effective vacuum pump suited to your needs.

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