1. According to the needs of users, our company is professionally designed and processed to meet the requirements of various customers;
2. The product adapts to a vacuum degree of more than 1×10⁻4Pa, and some products reach more than 1×10⁻⁸Pa;
3. Temperature adaptation range: -60℃~+120℃, some products can reach -196℃~+200℃;
4. The operation repeatability of the module is within 300mm ±0.03mm, and the deformation of the module under high and low temperature is within 500mm ±0.05mm;
4. The vacuum cleaning process will not pollute all kinds of expensive experimental equipment;
5. The deformation is small under atmospheric pressure, and deformation compensation can be carried out according to the needs;
6. We use stainless steel or materials with equivalent thermal expansion coefficient and extremely low outgassing rate to design and process;
7. The products sold by our company are tested and aging under the corresponding extreme conditions to obtain reliable data through experiments and practices, and are allowed to leave the factory. Customers can use them with confidence.
Processing Equipments :
Vacuum chamber introduction
PVD vacuum coating machine chamber
Chamber Model.: STAR1350×1500
Pressure range: 0.6Mpa ～ 10-10pa ; Leakage Rate（He2)< 1.3×10-9 pa.m³/s
Inspection equipments: Helium leakage detector, X-ray, vacuum gauge, Solid platform (flatness less than 5 m) et.
Processing equipments: welding equipments,rolling machine,CNC, horizontal machining center
Optical coating machine chamber
Chamber Model:OTFC2350×1700
Pressure range:0.6Mpa ～ 10-10pa; Leakage Rate（He2)< 1.3×10-9 pa.m³/s
Inspection equipments: Helium leakage detector, X-ray, vacuum gauge, Solid platform (flatness less than 5 m) et.
Processing equipments: welding equipments,rolling machine,CNC, horizontal machining center
Chamber Model:OTFC1900×1700
Pressure range:0.6Mpa ～ 10-10pa; Leakage Rate（He2)< 1.3×10-9 pa.m³/s
Inspection equipments: Helium leakage detector, X-ray, vacuum gauge, Solid platform (flatness less than 5 m) et.
Processing equipments: welding equipments,rolling machine,CNC, horizontal machining center
Chamber Model:STAR1300×1500
Pressure range:0.6Mpa ～ 10-10pa; Leakage Rate（He2)< 1.3×10-9 pa.m³/s
Inspection equipments: Helium leakage detector, X-ray, vacuum gauge, Solid platform (flatness less than 5 m) et.
Processing equipments: welding equipments,rolling machine,CNC, horizontal machining center
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