Use
Performance principle
heat conduction vacuum gauge and a diffused silicon piezoresistive vacuum gauge; in general, the resistance (Pirani) vacuum gauge ranges from 1.0 × 104Pa to Atmospheric pressure, the measured value is easy to drift and unstable. The piezoresistive vacuum gauge has high accuracy and stability in this measuring range, but the piezoresistive vacuum gauge cannot measure the vacuum higher than 1.0 × 103 Pa. Therefore, the two are combined to achieve In order to measure vacuum with a wide range and high accuracy, the two sensors are always in a strong state of work.
Technical Information
Measuring range: 1× 10-2~ 1.5 × 105 Pa
Measuring principle:
1.0 × 103 ~ 1.5 × 105 Pa Diffused Silicon (MES) Piezoresistive Sensor
1.0 × 10-1 ~ 1 × 103 Pa resistance (Pirani) thermal conductivity sensor
Accuracy (nitrogen):
9.5. × 104~ 1.1 × 105 Pa ±2.5% of reading
1 × 104 ~ 9.5 × 104Pa ±5% of reading
1 × 10-1 ~ 1.0 × 104Pa ±25% of reading
1 × 10-2 ~ 1 × 10-1 Pa can be measured
Repeatability 1× 10-1 ~5 × 103 Pa 5% of reading
Output signal (measurement signal)
voltage range
Error signal greater than 10.5VDC or 9.5V (filament broken)
Minimum impedance 10 kΩ
Response time 100ms
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