Helium mass spectrometer leak detector is a mass spectrometer mainly used for vacuum leak detection, with good performance and high sensitivity.
Helium mass spectrometer leak detector generally consists of a mass spectrometry chamber, vacuum system, electrical system, and sometimes equipped with an auxiliary vacuum system.
Below, the editor will provide you with a detailed introduction:
1. Mass spectrometry room
Visually speaking, the mass spectrometry chamber is the heart of a helium mass spectrometer leak detector, consisting of an ion source, an analyzer, and an electrical system. The cold cathode magnetic control rules are also placed within it and its magnetic field is used. In order to facilitate the amplification of small particle flows, high resistance and electrometer tubes are also placed in the mass spectrometry chamber. The mass spectrometry chamber shell is made of non-magnetic materials, which are emptied internally, and the external magnet generates a magnetic field for the magnetic analyzer.
2. Vacuum system
The vacuum system provides the conditions for the normal operation of the mass spectrometry chamber. Due to the requirement of a vacuum value of 0.001-0.01Pa for the normal operation of tungsten negative electrodes, the high transfer rate of helium ions in the analyzer has been confirmed. Therefore, it is necessary to establish a high vacuum system. The energy-saving valve in the system is designed to meet the requirements of adjusting the working pressure of the mass spectrometry chamber. When the working pressure is fully opened, the sensitivity of leakage measurement is highest, so larger leaks can be opened under the premise of allowable conditions. In order to correct the sensitivity of leakage measurement, the system has set a standard leakage.
3. Electrical system
The core of the electrical part of a helium mass spectrometer is the power supply and measurement of the mass spectrometry chamber, while other parts include the power supply and control part of the vacuum system, control panel, and export instrument. It mainly includes small current amplifiers and export devices, low-frequency generators, high-voltage rectifiers, and stable current delivery devices. The high-voltage rectifiers provide a cold cathode magnetic control regulated power supply.
Auxiliary vacuum system configuration
In helium mass spectrometer leakage measurement technology, it is necessary to set up an auxiliary vacuum system based on the structure, specification requirements, and specific leakage measurement conditions to ensure the working vacuum value of the leakage instrument, perform gas separation, reduce reaction time and clearance time, and minimize adverse effects on sensitivity in certain environments
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