High performance dry scroll vacuum pump is a new type of dry pump which has been popularized rapidly in recent years. Because of its superior performance, it is rapidly replacing the traditional oil seal rotary blade pump in the field of vacuum, especially in the field of scientific research and vacuum equipment. At present, scroll pumps are mainly used in analytical instruments, semiconductor chip production lines, liquid crystal display production lines and scientific research equipment.
(1) high compression ratio and stable pumping speed in a wide range of pressure.
(2) the structure is simple and the reliability is high.
(3) the working pressure range is wide and the power change is small.
The dry scroll vacuum pump has the advantages of simple structure, few parts, small clearance, small leakage rate, high compression ratio and stable pumping speed in a wide pressure range; the change of the volume of the compressed cavity is continuous, so the driving torque is small, the power change is small, the vibration noise is small, and the reliability is high.
The basic principle of a dry scroll vacuum pump is compressed in the crescent cavity consisting of a scroll rotor and a scroll stator. The vortex stator is fixed to the periphery of the frame, and a suction port is opened on the periphery of the scroll stator. The exhaust port is opened at the center of the vortex rotor and the vortex stator vortex body. The vortex lines of the vortex stator and the vortex rotator are basically the same. The two phases are staggered 180 degrees. As a result, a series of crescent compression cavities are formed between the two vortices. When the rotor rotates, the crescent cavity is moved to the center of the crescent cavity, and the volume of its volume becomes smaller continuously, and the suction, compression and exhaust process of the turbine type dry pump is completed.