Rotary vacuum pump in microelectronics industry

Vacuum pump has been successfully applied in microelectronics industry. Most of the rotary vane vacuum pumps are small and medium vacuum pumps. There are two types of rotary vane vacuum pump: single-stage rotary vane vacuum pump and double-stage vacuum pump. The so-called two-stage rotary vane vacuum pump is to connect two single-stage pumps in series in structure. Generally, they are made into two-stage ones to obtain higher vacuum.

Microelectronics technology requires that the size of electronic components and circuits is getting smaller and smaller, and the requirements of integration are getting higher and higher. This is closely related to the application of vacuum technology, especially the micromachining technology of VLSI. The formation of its geometry structure, the growth technology of ultra-thin layer and the particle beam injection technology all need high-quality and clean vacuum environment, which shows the dependence of its development on vacuum technology and equipment. At present, the working procedure of VLSI needs vacuum condition (the rotary vane vacuum pump can provide it). Therefore, in microelectronics technology, rotary vacuum pump plays a certain role.

Microelectronics technology is a high-tech electronic technology based on various semiconductor devices with integrated circuit as the core. It is characterized by small volume, light weight, high reliability and fast working speed. Microelectronics technology has a huge impact on the information age.


Microelectronics technology is developed on the basis of traditional electronic technology. The reason why it is called “microelectronics” as the name implies is that it is an advanced technology in the micro category, with the characteristics of “four micro”: it processes signals in the micro electronic movement in a solid; its working range is the micro area of the solid even to the lattice level; the transmission and exchange of signals are only carried out in a very small scale; its volume It is very large. It can integrate an electronic functional component or even a subsystem into a microchip. In a word, microelectronics technology is a unique and magical special technology that works in the scope that is almost invisible to the naked eye.

Microelectronics technology also has a profound impact on the consumer market of electronic products. Low price, reliable, small size, light weight microelectronics products emerge in an endless stream. Electronic technology products and microprocessors are no longer the aristocrats of the world of special scientific instruments, but settled in a variety of popular products and entered the homes of ordinary people. For example, electronic toys, game machines, learning machines and other household electrical products. Even the traditional mechanical products of automobile have penetrated into the microelectronic technology. The electronic engine monitoring system, automobile security system, taxi meter and so on have been widely used. Sometimes there are even dozens of microprocessors in modern automobile.

The above content mainly introduces the successful application of rotary vacuum pump in microelectronics industry, which is widely used in the production and scientific research departments of metallurgy, machinery, military industry, electronics, chemical industry, light industry, petroleum and medicine. It has been widely used in food vacuum packaging and plastic industry vacuum forming. Paper conveying, vacuum fixture and vacuum suction in printing industry.

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