The main influencing factors of target working stability in vacuum coating:
Material selection: Different applications require different types of target materials, such as metals, ceramics, semiconductors, etc. The target material must have sufficient heat resistance and chemical stability to maintain its physical and chemical properties in a vacuum environment.
Purity: The purity of the target material is critical to coating quality. Even tiny impurities or gas residues can cause coating quality to deteriorate or become unstable. High-purity targets usually provide more stable coating quality.
Size and shape: The size and shape of the target affects the uniformity of the coating. Large-area targets can provide greater coating coverage, but also require more powerful electron beam or magnetron sputtering capabilities. Proper target size and shape ensures coating uniformity.
Heating and cooling: During the vacuum coating process, the target often needs to be heated to evaporate or sputter the material. The heating and cooling process of the target must be properly controlled to avoid burning the target or changing the material structure due to excessive temperature.
Magnetic field design: Magnetic field design can have a significant impact on the stability of the target. Especially in coating technologies such as magnetron sputtering and magnetron arc deposition
Deposition rate and process parameters: The working stability of the target is also affected by the deposition rate and other process parameters. In some cases, too high a deposition rate or too long a working cycle may cause the target to wear out too quickly and require frequent replacement.
Cooling system: Coating equipment is usually equipped with a target cooling system to keep the target working within a suitable temperature range. This helps extend target life and maintain operational stability.
Gas environment: Some coating processes require specific gas environments, such as nitrogen, argon, etc. Maintaining a proper gas environment is also important for target stability.
Target surface cleaning and preparation: Impurities or oxide layers on the target surface may affect the adhesion and quality of the coating. Therefore, targets often need to be cleaned and treated to ensure surface purity and quality.
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