Vacuum pump for cleanroom usage
Multi – stage roots pump for cleaning process
Aiming at the clean and dry vacuum environment required by the cleaning process, the vacuum multi-stage roots pump provides an ideal solution for the industrial and research and development fields.
Dry pump for cleaning process
Vacuum has a mature multi – stage roots dry pump technology, for the cleaning process to provide a variety of solutions. In these applications, vacuum pumps are characterized by high pumping speed, high durability and high reliability.
Multi-stage roots pumps are designed for oil-free and pellet-free applications with pressures ranging from 3 · 10-2 hPa per atmosphere. The air-cooled pump is an excellent alternative to vane pumps for use in residual gas analysis systems, electron microscopes, or UHV systems. They can be used as ideal crude vacuum pumps for turbomolecular pumps.
Vacuum pumps for industrial use
At present, tens of thousands of semiconductor process pumps have been installed all over the world, in industrial applications, also play the advantages of multi-stage roots pumps. Water pump pump can be used as a clean process standards, can also be used in mildly corrosive used for purifying gas in the process of use, or used in condensed matter.
Roots pump combinations constitute different types of pump groups. In decorative or tool coated vacuum solutions, roots pump sets serve as the basis for an entire oil-free pumping system.
Roots pump notes for operation
In the process of operation, the vacuum unit should have uniform sound, no noise and abnormal vibration without rules. Pay attention to the motor load and the temperature rise of each part of the pump. Under normal circumstances, the maximum temperature rise of roots vacuum pump shall not exceed 40 ℃ and the maximum working temperature shall not exceed 80 ℃. If oil leakage is found in the work, the work should stop immediately, after pressure relief inspection, repair. Roots vacuum pumps are not allowed to continue operations or to be overworked with pressure after the discovery of an oil leak.
In the work must ensure the normal circulation of cooling water in and out. Roots vacuum pump vacuum unit start: open the intermediate pump and the main pump circulation cooling water inlet and outlet valve to ensure the circulation cooling water normal. Buffer tank drain valve shut off water pump, start the water pump, to run the normal (after) motor and pump noise equilibrium, slowly open before the water pump on the by-pass pipe valves and roots vacuum pump inlet valve. After the system pressure reaches the allowable inlet pressure set by the intermediate pump, the intermediate pump shall be started. If the automatic control block is adopted, it shall be directly transferred to the automatic control block, and the starting process of the unit shall be automated. For manual control, start the main pump when the outlet pressure of the intermediate pump reaches the allowable inlet pressure of the main pump.
