Vacuum Gauge is an instrument that measures vacuum or air pressure. Generally, the changes in a certain physical effect under different air pressure are measured for air pressure. Widely used in scientific research and industrial production.
According to the different physical mechanisms used in the vacuum measurement principle, the main vacuum can be divided into three categories, namely the use of mechanical properties, using gas dynamics and using a vacuum meter with electrical particles.
The typical vacuum measures using mechanical properties include Bourdon and thin -film capacitance regulations; typical vacuum measures using gas mechanical effects include Pirani resistance regulations and electrical puppets; There are heat cathode power departure regulations and cold cathode power.
1.（Bourdon）
2. Capacitance Diaphragm Gauge
4. Thermocouple gauge
5. Hot cathode ionization gauge
6. Cold cathode ionization gauge
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