Vacuum unit is generally named according to the type of main pump, and then can be classified according to product characteristics, such as oil-containing vacuum unit and oil-free vacuum unit; more commonly, according to the scope of vacuum application, can be divided into low vacuum unit, medium vacuum pump unit, high vacuum unit and ultra-high vacuum unit.
Low vacuum unit has high working pressure and large exhaust capacity, which is mainly used for vacuum conveying, vacuum impregnation, vacuum filtration, vacuum degassing of vacuum dryer, etc. Reciprocating pumps, water ring pumps, oil seal mechanical pumps, screw vacuum pumps, wet roots pumps, jet pumps, molecular sieve adsorption pumps and other types of vacuum pumps commonly used in low vacuum units can be competent, but according to the cleanliness, humidity and other conditions of the exhausted gas, it is necessary to configure the excluding Dust, gas, water, oil and water separator, drying trap and other facilities.
Medium vacuum unit is suitable for all kinds of vacuum systems which need large pumping speed and obtain medium vacuum, such as coating machine, vacuum smelting, vacuum heat treatment, medicine and chemical industry, electrical welding and so on. In the past, the combination of Roots Vacuum Pump + Oil Seal Mechanical Pump, Roots Vacuum + Water Ring Vacuum Pump and Double Roots Vacuum Pump was the most common vacuum unit. With the rise of oil-free vacuum pump such as screw vacuum pump, Roots vacuum pump + screw vacuum pump such as oil-free vacuum unit has gradually increased, more adaptable.
The high vacuum unit operates under the condition of molecular flow, the working pressure range is 10-2-10-6 Pa, the displacement is small, the pumping speed is big, generally the main pump by diffusion pump, molecular pump, titanium sublimation pump and cryogenic condensation pump to undertake, because they can not work directly in the atmosphere, therefore must be equipped with the front-stage pump, pre-pumping pump and so on, special. In order to prevent air pressure fluctuations, we need to install maintenance pumps and gas storage tanks.
The working pressure range of the ultra-high vacuum unit is 10-6-10-10 Pa. The limit vacuum of the main pump should be above 10-7-10-8 Pa and the corresponding pumping speed should be guaranteed in the working pressure range, such as sputtering ion pump, turbine molecular pump, etc. The material requirements of the system composition can withstand high temperature baking at 200-450 C and ensure low leakage rate and output. Gas rate and so on.
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