Diffusion pump for coating glass in vacuum coating
The vacuum coating technology is used to produce the aluminum coating on the laser record (CD) and the metal coating on the printed circuit board by the mask. The preparation of the film in vacuum includes the deposition of crystalline metal, semiconductor, insulator and other simple or compound films. Although chemical vapor deposition also uses vacuum means such as decompression, low pressure or plasma, the general vacuum coating refers to the deposition of thin films by physical methods. There are three types of vacuum coating: evaporation coating, sputtering coating and ion plating. Evaporation coating is called evaporation coating, which can deposit some substance on solid surface by heating.
Diffusion pump has been used as the main pump of coating vacuum system for decades.
EVP Vacuum is a leading company in the development of integrated solutions for all coating applications. Our experts are well aware of the technical requirements and can strongly support your business. Realize the optimization of standard components, the most compact design and the highest technical standard.
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EVP Vacuum system products oil vane pump, piston pump, roots pump, and diffusion pump can meet the application of coating industry.
We use mechanical pump and oil diffusion pump to achieve high vacuum condition. However, the diffusion pump can’t work alone without backing pump, so before the high diffusion pump work, it is necessary to pump with a mechanical pump. The diffusion pump needs to be preheated. After the vacuum degree is appropriate, place the low vacuum valve on the side of the diffusion pump, and then slowly open the high vacuum valve. The combination of diffusion pump and mechanical pump can reduce the pressure in the chamber to about 7×10-4 Pa.
Open the angle valve of it first before operation the pump, then process pump will work to suck diffusion pump. When vacuum pressure reaches 5 Pa in the diffusion pump, start to heat. When process pump begins to work, please open the pre-pumping valve, start mechanical pumps. Once the pre-pumping system reaches 500Pa, start roots pump. And when it reaches 0.5 Pa, and heating time of diffusion pump is enough (For models smaller than 320: 40 minutes; models from 500~603: 60 minutes; 800~900: 70 minutes, 1000~1600: 90 minutes), open front stage valve, close pre-pumping close angle valve, close process pump, open high valve, let the whole unit to work.
The diffusion pump shall be cleaned before installation, and then it can be filled with diffusion oil. Before heating the oil, the pump shall be vacuumized first. Before shutdown, the diffusion pump oil shall be cooled to 60-70 ℃, and then the front stage pumping can be closed, and finally the cooling water shall be closed.
Special Note: After shutting off diffusion pump’s heating power, cooling water in diffusion pump, pre-pumping pumps and process pumps can not be stopped immediately.
Edited by: Annie Hou; Copyright: EVP Vacuum Pump
Related products: diffusion pump/diffusion unit
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