How to choose vacuum pump for vacuum plasma cleaning machine

How many vacuum pumps are there in vacuum plasma cleaning machine? How to choose?

The vacuum pump has an important impact on the vacuum degree, vacuum time and the treatment effect of the whole equipment, so it is very important to select the appropriate vacuum pump for the quality of a vacuum plasma cleaning machine. There are two kinds of vacuum pumps commonly used in vacuum plasma cleaning machine, which are oil vacuum pump and dry vacuum pump. Today we will introduce the types and characteristics of the vacuum pump used in the plasma cleaning machine, as well as the points for attention when selecting the vacuum pump.

Oil vacuum pump

Oil vacuum pump is a general term for vacuum pumps that use oil to seal, lubricate, and cool down. One of the most commonly used oil vacuum pumps in vacuum plasma cleaners is the rotary vane vacuum pump.

Rotary vane vacuum pump

Rotary vane vacuum pump is a kind of mechanical vacuum pump with oil seal. Its main components are pump body, rotor, rotary vane, end cover, spring, etc. There are two types of rotary vane vacuum pump: single-stage and double-stage. The commonly used two-stage rotary vane vacuum pump in plasma cleaning machine is to connect two single-stage pumps in series in structure.

A rotor is eccentrically installed in the pump cavity of the rotary vane vacuum pump, and the outer circle of the rotor is tangent to the inner surface of the pump chamber. At the same time, two rotating blades with springs are installed in the rotor groove. When the rotor rotates, the centrifugal force and spring force keep the top of the vane in contact with the inner wall of the pump chamber, and the rotating rotor drives the vane to slide along the inner wall of the pump chamber. Rotary vane vacuum pump uses two blades to divide the pump cavity into three parts. Because the rotor is installed in an eccentric way, the space of the three parts will change with the rotation of the rotor. The purpose of pumping is to use the pressure difference.

Rotary vane vacuum pump in vacuum plasma cleaning machine is mostly used in small cavity (below 80L) or as the front stage pump of vacuum pump group.

Rotary vane vacuum pump has the following advantages:

Firstly, the rotary vane vacuum pump can also remove a certain amount of condensable gas and gas-water mixture while removing the dry gas in the cavity;

Second, the structure is relatively simple and easy to maintain;

Third, small size, light weight, easy to install and move;

Fourth, the vibration is small and the noise is low;

Fifth, the price is relatively low.

Dry vacuum pump

Dry vacuum pump is the abbreviation of oil-free dry mechanical vacuum pump. Dry vacuum pump is a kind of vacuum pump which does not use oil, water or other polymer as working medium. This makes the dry vacuum pump better in terms of cleanliness and prevents oil pollution, so the dry vacuum pump is mostly used in the vacuum plasma cleaning machine with high cleanliness requirements, such as semiconductor field, biomedical field and aerospace field. The most commonly used dry vacuum pump on vacuum plasma cleaning machine is dry screw vacuum pump.

Dry screw vacuum pump

Dry screw vacuum pump is a kind of vacuum pump which uses a pair of screws to rotate synchronously and reversely in the vacuum pump shell, so as to generate force to realize the functions of suction and exhaust. Because of the dry screw vacuum pump in work, there is no friction between each other, smooth operation, low noise, so there is no need for lubricating oil in the working chamber. Dry screw vacuum pump is an excellent dry-type vacuum pump with many advantages over other vacuum pumps

Firstly, the limit vacuum degree of dry screw vacuum pump is very high, and the maximum limit vacuum can reach 1-2 PA;

Second, the dry screw vacuum pump has stable performance, low noise, low failure rate and simple maintenance;

Third, a dry screw vacuum pump cavity and screw rotor surface have anti-corrosion coating, can adapt to harsh conditions.

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