Dry vacuum pump is mainly divided into two types: dry screw vacuum pump and dry scroll vacuum pump. The following section introduces the price of these two dry vacuum pumps.
Dry screw vacuum pump began to be used in the 1980s, initially in the semiconductor industry, and in the early 1990s in the chemical industry. Its main features are as follows:
1. No pollution to process gas
2. No waste water is produced.
3. No vacuum oil consumption, no soot emission
4. It can recover the extracted medium and condensate various solvents.
5. Achieving a Higher Vacuum
6. Low maintenance and cost
|Suction Capacity||50 Hz||m³/hr||180||250||360||540||720||1080||1260|
|Ultimate Pressure||50 Hz||mbar||0.02|
|Motor power||50 Hz||Kw||5.5||7.5||11||15||18.5||22||22|
|Rotary Speed||50 Hz||RPM||2900|
|Lubricating oil consumption||L||0.85||0.85||1.4||2||2||2||2|
|Cooling water consumption||L/min||2.5||2.6||2.8||3||4||4||4|
|Max. Permissible humidity||/||90%|
Double-wound scroll pump with 1 track screw and 2 fixed screw.
Operating at atmospheric pressure.
High-limit vacuum can be achieved.
Low vibration and low noise.
Maintenance cycles can be controlled by timetables.
Gas recovery system
Coating equipment, TMP front pump
Helium Leakage Detector
Semiconductor Manufacturing Technology
|Nominal capacity||2 L/s||4 L/s||8 L/s||16 L/s|
|Ultimate pressure||≤ 10Pa||≤ 3Pa||≤ 3Pa||≤ 1Pa|
|Leak rate||1X10-6 Pa.m3/S (for special gas can reach to 1X10-8Pa.m3/S)|
|Water vapor treatment capacity (gas ballast open)||5g/day||25g/day||25g/day||25g/day|
|Rotary speed||1450rpm (50Hz)||1450rpm (50Hz)||1450rpm (50Hz)||1450rpm (50Hz)|
|Noise (gas ballast)||＜60dB||＜70dB||＜70dB||＜74dB|
|Gas inlet connecting flange||KF25||KF25||KF40||KF40|
|Gas outlet connecting flange||KF16||KF25||KF25||KF40|
|Dimension（LXWXH）||380X210X270 (mm)||470X270X364 (mm)||490X340X370 (mm)||560X390X420 (mm)|
The price of the two dry vacuum pumps is based on performance and flow rate. If you want to know the detailed price, please contact us or send an email to email@example.com.