The Molecular Pump of Hybrid Molecular Pump covers almost all possible application fields. The unique design of electromechanical integration has the characteristics of high prestage pressure resistance and is suitable for the vacuum environment of 10-10-10 millibar.
1. Rich product range: covering all possible applications and all aspects of the market.
2. Patented technology of Hybrid Molecular Pump: maximum pumping capacity; Increase the pre-stage pressure resistance to 18 bar; The compression ratio increases by several orders of magnitude.
3. Integral rotor: each rotor is made of a single piece of aluminum alloy, with a minimum weight; The molecular pump can operate at any Angle at 360 degrees without any adjustment, reducing the pressure applied to the material and bearing.
4. High reliability, maintenance-free ceramic bearings: oil free, pollution free; Mean time to failure is greatly increased.
5. The built-in controller can use navigation control: simple and space-saving configuration; Navigation software can be easily controlled and monitored remotely.
| Model | unit | FB-300 | FB-650 | FB-1300 | FB-2000 | |||||
| High vacuum flange | mm | 100CF | 100ISO | 150CF | 160ISO-K | 200CF | 200ISO-K | 250CF | 250ISO-K | |
| Fore pipe flange | mm | 25KF | 40 KF | 40 KF | 50 KF | |||||
| Pumping speed | L/s | 300 | 650 | 1300 | 1800 / 2000 | |||||
| Compression ration | N2 | >108 | >109 | >109 | >108 | |||||
| H2 | >1×103 | >8×103 | >1×104 | >1×104 | ||||||
| Ultimate pressure | Torr | >3×10-7 | >2×10-6 | <8×10-8 | <5×10-7 | <8×10-8 | <5×10-8 | <8×10-8 | <5×10-8 | |
| Rotary Speed | rpm | 30000 | 24000 | 24000 | 24000 | |||||
| Bearing | / | Grease lubricated ceramic bearing | ||||||||
| Start-up time | min | <4 | <5 | <5 | <5 | |||||
| Fore pump speed | L/s | 2 | 4-8 | 8-15 | 8-15 | |||||
| Cooling | / | Air | Water | Water/air | Water/air | |||||
| Cooling water | Temp. | ℃ | / | ≤20 | ≤20 | ≤20 | ||||
| Consum. | L/min | / | 1 | 1 | 1 | |||||
| Mounting position | / | Any | Any | Any | Any | |||||
| Weight | Kg | 11 | 22 | 27 | 35 | |||||
Hybrid Molecular Pump is specially designed and developed for industrial applications in the field of sputtering coating. The structure of each pumping level and even the whole pump is optimized with the objective of maintaining optimal pumping performance under high argon load and temperature, and its circuit system has more additional features.
1. Unique drag level design of Hybrid Molecular Pump
The drag stage consists of an integrated two-layer disc, which greatly improves the heat dissipation efficiency and thus minimizes the internal temperature of the pump at high speed. It ensures that a large amount of argon is pumped under high pressure.
2. Aeration and exhalation device built in Hybrid Molecular Pump
The air filling and air releasing valves are integrated in the pump. The control of the air filling protection and air discharging process is driven by the internal circuit. No need for any part to be placed outside the pump body.
3. Built-in detection system of Hybrid Molecular Pump
It is equipped with special temperature control system, which enables it to monitor the air load, power and cooling water temperature of the pump in real time, ensuring that the material load and bearing load work within a safe range.
4. The built-in Hybrid Molecular Pump has a waterproof circuit system
All circuit systems, located in the pump sump, are waterproof to IP54 specifications.
5. Integrative model of Hybrid Molecular Pump
Molecular pump integrated drive power, gas protection configuration, analog I/O signal RS232 interface.
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