Diffusion pump unit

Operation Procedure of Diffusion Pump System

1.Connect primary vacuum pump, roots pump, diffusion pump, pilot valve of electromagnetic pressure difference valve, cylinder solenoid valve of vacuum valves, power and gas source of magnetic switch.

2.Connect vacuum pumps and cooling water of all water-cooled baffles configured in the unit.

3.Connect ionization and thermocouple regulation of the high valve, ionization in the side of water-cooled baffle and thermocouple regulation of the preceding pipe. Connect vacuum gauge to the power supply, and then set the measuring line connected to the gauge to start the measurement.

4.All valves should be in the closed state when the unit is power off.

 

5.Before heating, please make sure the amount of oil is in place. And observation of the oil is a must when diffusion pump is in working to avoid burning pump dry.

 

6.When a process pump is installed in the vacuum unit, open the angle valve of it first before operation the pump, then process pump will work to suck diffusion pump. When vacuum pressure reaches 5 Pa in the diffusion pump, start to heat. When process pump begins to work, please open the pre-pumping valve, start mechanical pumps. Once the pre-pumping system reaches 500Pa, start roots pump. And when it reaches 0.5 Pa, and heating time of diffusion pump is enough (For models smaller than 320: 40 minutes; models from 500~603: 60 minutes; 800~900: 70 minutes, 1000~1600: 90 minutes), open front stage valve, close pre-pumping close angle valve, close process pump, open high valve, let the whole unit to work.

7.When there is no process pump in the vacuum unit, open the pre-stage valve and the pre-pumping valve, start the pre-stage pump. When the vacuum reaches 500Pa, start the roots pump. When vacuum pressure reaches 5 Pa in the diffusion pump, start to heat. And once it reaches 0.5 Pa, and heating time is enough as said in No.6, close the pre-pumping valve, open the high-valve, let the whole unit to work .

8.If there is neither roots pump nor process pump, please just open pre-stage valve and pre-pumping valve, and open mechanical pumps. When vacuum pressure reaches 0.5 Pa, and heating time is enough as said in No.6, close the pre-pumping valve, open the high-valve, let the whole unit to work.

  9.Processes to shut down the whole unit:

① When a process pump and roots pumps are installed in the vacuum unit, firstly, shut off diffusion pump’s heating power, turn off the high valve, turn off roots pump, while mechanical pumps work as usual. Start the process pump to maintain the whole system. When system achieves normal working conditions, close the front stage valve, turn off mechanical pumps and process pumps still work as usual. When the diffusion pump temperature dropped below 50 ℃, shut down the process pump system. All valves are closed. Cooling water can continue cooling for some time and then stop.

② If there is neither roots pump nor process pump, shut off diffusion pump’s heating power, turn off the high valve, pre-pumping system works as usual. When the diffusion pump temperature dropped below 50 ℃, shut down the process pump system. All valves are closed. Cooling water can continue cooling for some time and then stop.

Special Note: After shutting off diffusion pump’s heating power, cooling water in diffusion pump, pre-pumping pumps and process pumps can not be stopped immediately.

Tags: Diffusion pump, Diffusion pump system, Water-cooled baffle

Edited by: Emily Fu / EVP vacuum solution

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