The diffusion pump is the main equipment used to obtain high vacuum (10-2-10-5pa). It is composed of high vacuum pumping system, such as oil diffusion pump main pump and valve, water cooling baffle, pipeline, mechanical vacuum pump (front pump), etc., which can obtain the working vacuum degree of (10-2-10-4pa).
一、 overview of diffusion pump:
The diffusion pump is used for high vacuum and ultra-high vacuum pumping in high vacuum system, which has no serious harm to the working liquid. It cannot directly exhaust the atmosphere and needs to be equipped with the pre-stage pump. diffusion pump is used in electronic industry, chemical industry, atomic energy industry and space simulation test.
二、 Principle of diffusion pump:
The pump will be smoke diffusion pump so far around 10 pa pre vacuum, at room temperature with low saturated vapor pressure of liquid, by heating heater, oil vapor produced along the steam catheter upward movement, after a few level nozzle orientation, high speed, will spread in oil gas in steam to the level before the end. From the former pump to the atmosphere, the oil vapor is sprayed on the wall of the pump, and when it is cooled, it flows back to the bottom of the pump, which is repeated to achieve a high vacuum purpose.
三、 Characteristics of diffusion pump:
The diffusion pump is characterized by a large pumping capacity, which can be selected from 190L/S to 49000L/S. It can work continuously for a long time. It is widely used in electronic, chemical, metallurgy, aviation, aerospace, materials, biomedicine, atomic energy, space exploration and other high-tech fields. Such as various vacuum furnace, vacuum coating equipment, vacuum freeze drying equipment, etc.