Oil diffusion vacuum pump return oil how to maintain

With the continuous development of vacuum technology, vacuum equipment has been widely applied in metallurgical industry. As the main pump of most high vacuum systems, oil diffusion pump has many advantages, such as simple structure, high pumping rate, easy to obtain high vacuum and so on. In this paper, how to control the oil return rate of oil diffusion pump in order to obtain high vacuum system is discussed from the design principle of oil diffusion pump and the experience accumulated in production practice.

What about return oil of oil diffusion vacuum pump? If the vacuum gauge is not damaged, return oil is generally not needed to repair, mainly cleaning the oil of diffusion pump in vacuum chamber. It is best to use gasoline to wipe the wall of the vacuum chamber and wipe it again with alcohol. Oil must be clean is the most critical, if there is oil in the room, there will be white coating, film quality is very poor and other phenomena, not because of the damage of electroplating equipment, but because the vacuum room oil.

Oil diffusion vacuum pump return oil how to maintain?

oil diffusion vacuum pump

The frequent return of oil diffusion vacuum pump may be the following problems:

1. The cooling water path is not smooth or the water pressure is not enough, resulting in the cooling capacity decline, the first half of the oil diffusion vacuum pump heating, oil vapor can not be good liquefaction.

Solution: Connect the inlet pipe of the oil diffusion vacuum pump with a 4 MPa gas source, blow out the scale, and the outlet pipe with the same 4 MPa blowing. If the scale is a lot and strong, it can pass into dilute hydrochloric acid. Or replace the oil diffusion vacuum pump.

2. When the heating temperature is too high, the heater power of the oil diffusion vacuum pump does not conform to the rated power and is too high, resulting in a large amount of steam, resulting in oil return, and the replacement of the electric furnace wire can be solved.

3. If the fuel quantity is too high and the fuel quantity is too high, the steam circulation will be slow and the compression time will be delayed to the lower stage, resulting in oil return. The control of the fuel quantity according to the information provided by the manufacturer can be avoided.

4. Oil oxidation, oil diffusion vacuum pump oil oxidation, viscosity and steam flow are affected, can not reach the injection speed, naturally return to the vacuum chamber. Remove the pump center, wash it with 120# gasoline, then grind it, remove the carbon deposit and black oxide layer, wash and dry it with 120# gasoline again, then install it, pour in the oil diffusion vacuum pump oil or silicone oil, and heat it several times before it can be put into operation. Prevent contamination of workpieces.

5. If the oil diffusion vacuum pump has been in service for more than 8-10 years, or is used in harsh environment, it may be considered to replace. Improve work efficiency and maintain cost.