Vacuum pump for vacuum adsorption

What is vacuum adsorption?

Vacuum adsorption refers to the connection of the suction port of vacuum pump with the object to be adsorbed through suction cup, pipe and other components. At the moment, the suction cup is similar to a closed container, which vacuumizes the suction cup to form the internal pressure from atmospheric pressure to negative pressure. The effect of the pressure difference between the external atmospheric pressure and the negative pressure is used to achieve the purpose of adsorbing the object.

Therefore, when selecting vacuum pump, it is necessary to select a real micro vacuum pump. In general, rotary vane vacuum pump and water ring vacuum pump are often used as the main pumps in vacuum adsorption industry.

The theoretical formula for calculating the adsorption force of vacuum adsorption:

S suction cup area (i.e. f ≈ 0.01 × maximum negative pressure of pump × suction cup area)

F ≈ 0.01 (101-p absolute pressure)

In the above formula,

S suction cup area: effective area of suction cup, unit: cm 2

F: Theoretical adsorption capacity, in KGF

P absolute pressure: absolute vacuum degree of micro vacuum pump, unit: kPa (kPa)

It can be seen from the formula that the theoretical size of the adsorption force has no relationship with the flow of the pump, but it is related to the flow parameters in actual use. In this case, the larger the flow rate of the micro vacuum pump is, the smaller the proportion of leakage is, the more conducive to maintain a higher vacuum degree of the pump, so as to obtain a greater adsorption force. For example, there are two pumps with the same limit vacuum degree. The flow of No. 1 pump is 1L / min, and the flow of No. 2 pump is 20L / min. in the same case of 0.1l/min leakage, the vacuum degree of No. 1 pump will be reduced a lot, because the leakage of 0.1l/min is too large for it. But the leakage of 0.1l/min is nothing to pump 2, and it can still maintain a high vacuum. Therefore, although the vacuum degree of the two is the same, but in practice, the adsorption force produced by No. 2 pump is larger.

Therefore, the vacuum degree and flow rate must be considered in the selection of vacuum pump. It is impractical to only pay attention to the vacuum degree.

On the release of an object after it has been sucked in. When it is necessary to release the sucked object, it is necessary to shut down the pump first, and do not vacuum continuously. When the pump is stopped, the object will fall immediately, because the pump has a certain ability to maintain pressure, and the vacuum will remain for a moment. In order to release the air system immediately, a branch should be added to the air system to connect an on-off valve, the pump should be shut down and the valve should be opened together to eliminate the vacuum in the air system immediately, so as to release the object reliably.


1. At the same time of negative pressure, the micro vacuum pump with large flow is stronger than the actual suction with small flow (because of the fast supplement, for the system, the ability to maintain this negative pressure is strong). For example, the peak flow of vca5038 is 38L / min. compared with 15L / min of pcf5015, although the negative pressure is the same, the actual adsorption capacity is stronger than pcf5015n.

2. The above adsorption weight refers to the vertical upward adsorption (i.e. the suction force of the pump is upward, which opposes the downward gravity of the object); while the vertical downward adsorption and side adsorption are much more complex, because they involve factors such as different friction coefficient of the contact surface and different stress conditions, and even problems such as moving after adsorption, which cannot be simply selected according to the above table.

Micro vacuum adsorption:

The object of microassembly is mainly micro devices of micrometer or submillimeter size. The light, small, thin and soft characteristics of these micro devices put forward very strict requirements and restrictions on the clamping mode and clamping force control of the micro gripper. A vacuum adsorption micro clamping system is designed for flat plate micro devices, which can not only absorb parts of different shapes and sizes, but also adjust the position and orientation of parts and detect the contact force. In the case of only considering the norm, the adsorption mechanical model of the micro device is established, which provides the calculation basis for stable adsorption and release. Finally, the assembly experiment of micro assembly with the accuracy of parallelism error no more than 8 μ m is completed, and the assembly effect is good.

Composition of micro vacuum adsorption system:

According to the assembly process, assembly strategy and technical requirements, the assembly tasks to be completed are analyzed and studied, and the overall design of the micro clamping system is carried out by using the design idea of overall first and then local. The traditional mechanical clamping method is no longer suitable for flat micro devices, and vacuum adsorption is widely used in the assembly of such parts because of its nondestructive clamping and convenient control.

The system is mainly composed of four parts: precision electronic control displacement table, main part of micro adsorber (vacuum adsorption micro gripper), adsorption gas system and software control system. Among them, the main part of the micro adsorber includes rotating mechanism, changing mechanism, sensor and end adsorber, which can realize the functions of part attitude adjustment, changing adsorber, automatic emergency stop and contact force detection, etc., which is the most important part of the overall scheme; the main function of the auxiliary changing device is to assist the main part to complete the changing action of the adsorber and hold the standby adsorber; the suction The attached air circuit system mainly completes the adsorption and release of the micro devices, and provides the pneumatic power for the exchange mechanism and auxiliary devices; the software control system mainly completes the control of the pneumatic components, the control of the displacement table and the stepping motor, the part identification and the position adjustment through the machine vision.

Parameters of vacuum pump commonly used for vacuum adsorption:

Rotary vane vacuum pump parameters:

Model Pump speed (m3/h) Ultimate vacuum (Pa) Motor Power (KW) Inlet Diam (inch) Rotary speed (rpm) Oil Capacity (L) G.W(kg) Noise dB (A) Dimensions (mm)
50HZ 60HZ
SV-010 10 12 150 0.55 (3ph)0.90 (1ph) G1/2 1400 0.5 20 64 405*253*210
SV-020 20 24 150 0.75(3ph)0.90(1ph) G1/2 2800 0.5 25 64 405*253*210
SV-025 25 30 150 0.75(3ph)0.90(1ph) G1/2 2800 0.5 26 64 405*253*210
SV-040 40 48 50 1.5 G11/4 1400 1.0 48 67 660*300*270
SV-063 63 75 50 2.2 G11/4 1400 2.0 81 68 695*420*295
SV-100 100 120 50 3.0 G11/4 1400 2.0 85 72 735*420*295
SV-160 160 192 50 4.0 G2 1400 4.5 152 74 805*520*410
SV-200 200 240 50 5.5 G2 1400 4.5 159 76 825*520*410
SV-250 250 300 50 5.5 G2 1400 7.0 230 76 1000*550*410
SV-300 300 360 50 7.5 G2’’ 1400 7.0 236 76 1200*550*410
SV-630 630 750 10 15 DN100 960 35 620 75 1630*1300*980
SV-750 750 900 10 18.5 DN100 1150 35 640 76 1630*1300*980


Water ring vacuum pump parameters:

Model Max. suction capacity Ultimate vacuum
Motor power
Operating liquidflow rate
m3/min m3/h
2BV2-060 0.45 27  






0.81 2840 2.5 62 37
2BV2-061 0.86 52 1.45 2840 2.5 65 41
2BV2-070 1.33 80 2.35 2860 3 66 66
2BV2-071 1.83 110 3.85 2880 4.7 72 85
2BV5-110 2.75 165 4 1440 7.2 63 120
2BV5-111 3.83 230 5.5 1440 8.8 68 150
2BV5-121 4.66 280 7.5 1440 11 69 210
2BV5-131 6.66 400 11 1460 16 73 280
2BV5-161 8.33 500 15 970 22 74 390
2BV6-110 2.75 165 4 1440 67 63 150
2BV6-111 3.83 230 5.5 1440 10 68 200
2BV6-121 4.66 280 7.5 1440 12 69 230
2BV6-131 6.66 400 11 1460 17 73 315
2BV6-161 8.33 500 15 970 23 74 426
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