vacuum pump system in electric vacuum industry
In addition to mechanical properties and processing properties, the structural materials of electric vacuum should also meet the requirements of other properties: easy degassing, low saturated vapor pressure, certain chemical stability, certain purity and cleanliness, proper radiation ability, temperature property and optical property. Therefore, the electric vacuum process is special, and the cleaning requirements are strict, so the pollution of parts should be removed or reduced to the maximum extent.
The production of electronic tubes, the mounting of tubes and the processing of parts must be carried out in a well closed room. Walls and ceilings in the room are coated with high quality semi gloss, tough paint. The floor shall be covered with clean and waxed asphalt compound or frosted tile. Air must be filtered in two or more stages. Keep the relative humidity below 50%.
In the room where precise mounting is carried out, the number of personnel shall be as small as possible. Parts and other supplies are delivered through sliding cupboard doors. The finely framed room is separated from the large air-conditioned room. The air in the inner room needs to be further filtered. In addition to air conditioner and filter openings, walls, floors, ceilings and doors must be closed as tightly as possible. Building materials such as plaster, building board, wood board and cement on the wall are uniformly coated with high-grade gloss or semi gloss paint.
For work with special requirements, use a drying oven to prevent dirt (operator’s breath, scalp, etc.) that cannot be blocked by other methods. When necessary, for example, when processing the cathode surface to be activated, the drying oven can only use specific inert gas.
In order to meet the needs of IC process production, the workshop should meet the corresponding clean room level standards.
Because the working principle of all kinds of electric vacuum devices is based on the electric field and magnetic field to control the movement of electrons in space so as to achieve the purpose of amplification, oscillation and image presentation. Therefore, the vacuum pump system can prevent the collision between electrons and gas molecules, ensure the movement law of electrons in space, avoid the cathode oxidation poisoning of emitting hot electrons, and ensure the normal work of electronic devices by pumping different vacuum degree required by different electronic vacuum devices。
vacuum pump system in electric vacuum industry
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