Water ring vacuum pump system can solve the process characteristics of the semiconductor industry. The water ring vacuum system is oil-free, and the equipment has high stability and reliability, which improves the overall electrical power semiconductor process platform and manufacturing capabilities.
What are the vacuum process applications in the new energy automotive semiconductor industry?
1. In the semiconductor industry, vacuum is used in bonding processes such as evaporation, sputtering, PECVD, vacuum dry etching, vacuum adsorption, test equipment, robotic handling and adsorption, and automated vacuum cleaning. The semiconductor industry corresponds to different vacuum requirements such as medium and high vacuum, sweep vacuum (rough vacuum), and process vacuum (rough vacuum). Some also require the vacuum pump to return zero to the pumped space to protect the workpiece from contamination.
2. Process vacuum mainly uses negative pressure adsorption for workpiece handling or clamping, and cleaning vacuum mainly uses the difference between negative pressure and atmospheric pressure to remove or transport liquids or particles. In such applications, water ring vacuum pumps and multi-stage centrifugal fans are very critical Production auxiliary equipment.
Semiconductor vacuum system application requirements and cases:
1. Application requirements—the process characteristics of the semiconductor industry require the system to be absolutely oil-free, and the requirements for the stability and reliability of the equipment are relatively high.
2.Application case—an electrical company has a first-class power semiconductor production line, forming a complete set of capabilities from design, manufacturing, packaging and testing, and a supporting construction project for electrical automotive components. Two sets of 2BE water ring vacuum systems are selected (water ring vacuum pumps). It is safe and reliable, 100% oil-free, and fully meets the process vacuum requirements of the semiconductor industry). At present, the equipment has been installed and debugged, and the unit is operating stably.
The entire production capacity of the project will be used for the production of substrates and components for new energy vehicles, the application of vacuum pump systems, and the overall improvement of the electrical power semiconductor process platform and manufacturing capabilities. The vacuum pump system/vacuum pump process can meet the huge market demand in the field of new energy vehicles. Further expand, strengthen and optimize the power semiconductor industry.
With the autonomy of high-speed rail technology, especially the localization of chips and semiconductors, EVP focuses on vacuum pump system solutions, vacuum system supporting equipment and other services, providing customers with innovative vacuum pump products and after-sales maintenance and other one-stop services.