vacuum chamber common cleaning methods

The commonly used cleaning solvents for vacuum chamber include water containing detergent, petroleum fraction, dilute acid, alkali, organic solvent, various metal cleaning agents, etc. according to the different surface attachments, different solvents are needed for cleaning. Acid metal cleaner is required for vacuum chamber such as rust and organic solvent for mineral oil

1. Ultrasonic cleaning

Ultrasonic cleaning is to use the cavitation, acceleration and direct inflow of ultrasonic in the liquid to directly and indirectly affect the liquid and dirt, so that the dirt layer is dispersed, emulsified and stripped to achieve the purpose of cleaning

2. Electrolytic etching cleaning

Electrolytic etching cleaning is similar to electrolytic polishing. It is used to remove the thin rust or oxide film on the surface of metal parts by electrolysis in solvent. It is mainly used for alloy parts with high chemical stability, such as stainless steel, heat-resistant steel, etc.

3. Steam degreasing cleaning

Steam degreasing refers to the continuous steam cleaning of the adhesive surface dining agent to achieve the purpose of degreasing. It is suitable for the cleaning of surface lipid film and grease film. The operation method is simple and can realize large-scale cleaning. After scrubbing or ultrasonic cleaning, steam degreasing cleaning can achieve good cleaning effect for some substrates with firm attachments or serious pollution

4. Discharge cleaning

Discharge cleaning is generally used in high vacuum and ultra-high vacuum chamber cleaning. The effect of discharge cleaning depends on the material of motor, the geometry of vacuum chamber and its relationship with the surface. Electron bombardment is used to cause desorption and the removal of some hydrocarbons

5. Nitrogen cleaning

Nitrogen cleaning mainly takes advantage of the characteristics of low adsorption heat of nitrogen on the surface of materials, short absorption time of vacuum chamber, and easy to be pumped away. Nitrogen is used to wash the polluted vacuum system, and occupy the adhesion space of other gas molecules such as water and gas, thus shortening the pumping time of vacuum system