Mass Spectrometer Leak Detector in Semiconductor Vacuum System of Use
Posted on Thu, 30 Jul 2020 06:50:51 +0000
There are two kinds of defects in vacuum system of semiconductor equipment: one is the defect of vacuum pump unit and measuring system, the other is the disclosure of vacuum system. As for the first kind of defect, it can be confirmed by testing the limit vacuum degree of vacuum pump or changing ...
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