Application of Helium Mass Spectrometer Leak Detectors in Coating Equipment
Helium mass spectrometer leak detectors are highly precise and sensitive leak detection devices widely used in various industrial fields requiring high or ultra-high vacuum environments, including coating equipment. During the production process, coating equipment requires frequent maintenance and cleaning, which poses a risk of internal cavity sealing failure. Poor sealing can lead to uneven film thickness and substandard film parameters around the product, increasing production costs. Therefore, using helium mass spectrometer leak detectors to detect leaks in coating equipment is a crucial tool for ensuring product quality and production efficiency.
1.The Importance of Leak Detection in Coating Equipment
During the production process, especially during PECVD deposition of Si3N3 anti-reflection layers, coating equipment requires a high or ultra-high vacuum environment. Poor sealing of the equipment can allow external gases to enter, affecting coating quality and product performance. Furthermore, cleaning the interior of the coating equipment during maintenance can also cause seal failure. Therefore, regular leak detection of coating equipment and timely repair of leaks are crucial to ensuring proper operation and product quality.
2.The Application of Helium Mass Spectrometer Leak Detectors in Coating Equipment Leak Detection
(1)Leak Detection Preparation
Start the helium mass spectrometer leak detector and set the internal leak detection mode to “stop without venting” to prevent atmospheric shock to the vacuum system during the leak detection process.
Put the leak detector in “standby” mode and prepare to connect it to the coating equipment.
(2)Connecting the Coating Equipment
Connect the leak detector’s detection port to the coating machine via a bellows. A high-vacuum manual damper valve can be installed at one end of the bellows to control gas flow.
Start the coating machine’s own evacuation system, then open the high-vacuum manual damper valve connected to the leak detector. Once the vacuum level in the coating machine is below 200 Pa and relatively stable, begin leak detection.
(3)Leak Detection
Press the “Start” button on the leak detector to enter the leak detection mode.
Once the leak rate displayed by the leak detector is relatively stable, you can perform a helium spray test on the suspected leak point in the coating machine. During the helium spraying, carefully observe the changes in the leak detector’s indication to determine the location and size of the leak.
(4)Leak Testing Completed
After completing the leak test, close the high vacuum manual damper valve and press the “Stop” button on the leak detector to place it in “Standby” mode.
Shut down the vacuum system of the coating machine and remove the bellows connecting the leak detector to the coating machine.
Turn off the power to the leak detector to complete the leak test.
3.Advantages of Helium Mass Spectrometer Leak Detectors in Coating Equipment Leak Detection
(1)High Precision
Helium mass spectrometer leak detectors have extremely high detection sensitivity, capable of detecting even the smallest leaks. This is crucial for ensuring the tightness of coating equipment and product quality.
(2)Fast Response
Helium mass spectrometer leak detectors have a short startup time and fast calculation speed, enabling leak detection to be completed in a short period of time, improving production efficiency.
(3)Strong Anti-interference Capability
Helium mass spectrometer leak detectors have strong anti-interference capabilities, eliminating various interference factors and ensuring the accuracy of test results.
4.Precautions
(1) Avoid Atmospheric Shock
During the leak detection process, ensure the leak detector is set to “Stop, No Venting” to prevent atmospheric shock to the vacuum system when the leak detector stops, potentially damaging the vacuum components.
(2) Pay Attention to Background Values
The complex internal structure of the coating equipment may result in a high background value for the leak detector, which can affect the detection of small leaks. Therefore, the coating equipment should be thoroughly cleaned and pre-treated before leak detection to reduce the background value.
(3) Avoid Gas Adsorption
If there are gas-absorbing substances such as lubricating oil or condensed water inside the coating equipment, the injected helium will be adsorbed, affecting the leak detection results.
Therefore, before leak detection, ensure that the coating equipment is dry, clean, and free of absorbent substances.
In summary, the EVP helium mass spectrometer offers advantages in leak detection for coating equipment, including high precision, rapid response, and strong anti-interference capabilities. It is a crucial tool for ensuring the tightness of coating equipment and product quality. During use, care should be taken to avoid atmospheric impact, background values, and gas adsorption to ensure accurate test results.
(The article comes from the Internet. If reprinting is not allowed, please contact our company to delete it.)