Vacuum pump products are huge in quantity, large in demand and low in output, but it is indeed an indispensable basic product that directly affects the quality of vacuum equipment function. The market of vacuum pumps varies according to the needs of users. From the rapid development of semiconductor industry and the expansion of dry pump and molecular pump applications, it is the main driving force of market growth. The following EVP vacuum pump manufacturers for you to introduce several commonly used models.how to choose best vacuum pump for your industry
2SK Liquid Ring Vacuum Pump
| Model | Suction capacity | Ultimate vacuum | Power | speed | Water supply | Inlet/outlet diam | Water inlet |
| m³/min | MPa（G） | KW | r/min | L/min | DN(mm） | (mm) | |
| 2SK1.5 | 1.35 | -0.097 | 4 | 1440 | 10-15 | 40 | G1/2” |
| 2SK-3 | 2.7 | -0.098 | 7.5/11 | 1440 | 15-20 | 40 | G1/2” |
| 2SK-6 | 5.4 | -0.098 | 15 | 1460 | 25-35 | 65 | G1/2” |
| 2SK-12 | 10.8 | -0.098 | 22/30 | 970 | 40-50 | 100 | G1/2” |
| 2SK-20 | 18 | -0.098 | 45 | 740 | 60-80 | 125 | G3/4” |
| 2SK-30 | 27 | -0.098 |
Although liquid ring vacuum pump belongs to rough vacuum pump, it still has a large market in petroleum, chemical industry, electric power, textile, papermaking and pharmaceutical products. In foreign countries, the sales volume of liquid-ring vacuum pump accounts for 14% of the total market, second to dry vacuum pump. Because most of the liquid-ring vacuum pump is castings, processing requirements are not high, and labor-intensive products, the liquid-ring vacuum pump has competitive advantages in price. The key is to improve the design, reduce volume, reduce weight, improve efficiency and reduce energy consumption.
H Piston Vacumm Pump
| Model | H-70 | H-150 | H-180 | H-200 | H-230 | H-300 | |
| Pumping speed (L/S) | 70 | 150 | 180 | 200 | 230 | 300 | |
| Ultimate pressure (Pa) | 1 | 1 | 1 | 1 | 1 | 1 | |
| Pump rotary speed (rpm) | 500 | 500 | 380 | 410 | 450 | 450 | |
| Suitable motor | Power (KW) | 5.5 | 15 | 15 | 15 | 18.5 | 22 |
| Rotary speed(rpm) | 1440 | 1440 | 1460 | 1460 | 1470 | 1470 | |
| Model | Y132S-4 | Y132M-4 | Y160L-4 | Y160L-4 | Y180M-4 | Y180L-4 | |
| Max. inlet pressure (Pa) | 1.3X104 | ||||||
| Max. Vapor Productivity(kg/hr.) | About 8.4 | ||||||
| Cooling waterconsumption (kg/h) | 150 | 200 | 450 | 450 | 450 | 700 | |
| Lubricated oil | Model | 1# vacuum pump oil | |||||
| Capacity (kg) | 18 | 40 | 45 | 45 | 45 | 63 | |
| Dimension | Inlet（mm） | 80 | 100 | 160 | 160 | 160 | 160 |
| Outlet（mm） | 50 | 80 | 100 | 100 | 100 | 100 | |
| Length x width x height (mm) | 650 X 630 X 1200 | 1010 X 680 X 1356 | 1140 X 940 X 1270 | 1140 X 940 X 1270 | 1140 X 940 X 1325 | 1140 X 1160 X 1325 | |
| Total weight (kg) | 525 | 970 | 1155 | 1155 | 1155 | 1525 | |
| Model | H-150G | H-150F | H-200F | H-300F | |
| Pumping speed (L/S) | 150 | 150 | 200 | 300 | |
| Ultimate pressure (Pa) | 1 | 1 | 1 | 1 | |
| Pump rotary speed (rpm) | 500 | 450 | 410 | 450 | |
| Suitable motor | Power (KW) | 7.5 | 11 | 15 | 22 |
| Rotary speed(rpm) | 1440 | 1460 | 1460 | 1470 | |
| Model | Y132M-4 | Y160M-4 | Y160L-4 | Y180L-4 | |
| Max. inlet pressure (Pa) | 1.3X104 | ||||
| Max. Vapor Productivity (kg/hr.) | About 8.4 | ||||
| Cooling water consumption (kg/h) | 200 | 200 | 450 | 700 | |
| Lubricated oil | Model | 1# vacuum pump oil | |||
| Capacity (kg) | 40 | 35 | 55 | 80 | |
| Dimension | Inlet（mm） | 100 | 100 | 160 | 160 |
| Outlet（mm） | 80 | 100 | 100 | 100 | |
| Length x width x height (mm) | 1010 X 680 X 1356 | 1305 X 825 X 1350 | 1300 X 925 X 1450 | 1300 X 1150 X 1465 | |
| Total weight (kg) | 970 | 905 | 1255 | 1650 | |
Rotary piston pump is an oil seal vacuum pump. Because the rotary piston pump is more useful and reliable, all kinds of vacuum furnaces at home and abroad, drying equipment coating, immersion rotary piston pump is a kind of rotary piston pump front pump, but casting heavy, processing workload is large, so foreign vacuum factories are looking for partners in China. In order to make domestic piston vacuum pumps enter the international market, it is necessary to further reduce the vibration and noise of pumps, prevent leakage and improve the reliability of injection and long-term operation of rotary piston vacuum pumps.
SV Rotary Vane Vacuum Pump
| Model | Pump speed(m3/h) | Motor Power(KW) | Inlet Diam (inch) | Rotary speed(rpm) | Oil Capacity(L) | G.W(kg) | NoisedB (A) | Dimensions(mm) | |
| 50HZ | 60HZ | ||||||||
| SV-010 | 10 | 12 | 0.37 (3ph)0.55 (1ph) | G1/2 | 1400 | 0.5 | 20 | 64 | 405*253*210 |
| SV-020 | 20 | 24 | 0.75 (3ph)0.90 (1ph) | G1/2 | 2800 | 0.5 | 20 | 64 | 405*253*210 |
| SV-025 | 25 | 30 | 0.75 (3ph)0.90 (1ph) | G1/2 | 2800 | 0.5 | 22 | 64 | 405*253*210 |
| SV-040 | 40 | 48 | 1.5 (3ph)2.2 (1ph) | G11/4 | 1400 | 1.0 | 50 | 67 | 660*300*270 |
| SV-063 | 63 | 75 | 2.2 | G11/4 | 1400 | 2.0 | 83 | 68 | 695*420*295 |
| SV-100 | 100 | 120 | 3.0 | G11/4 | 1400 | 2.0 | 87 | 72 | 735*420*295 |
| SV-160 | 160 | 192 | 4.0 | G2 | 1400 | 4.5 | 152 | 74 | 805*520*410 |
| SV-200 | 200 | 240 | 5.5 | G2 | 1400 | 4.5 | 159 | 76 | 825*520*410 |
| SV-250 | 250 | 300 | 7.5 | G2 | 1400 | 7.0 | 230 | 76 | 1000*550*410 |
| SV-300 | 300 | 360 | 7.5 | G2 | 1400 | 7.0 | 236 | 76 | 1200*550*410 |
| SV-630 | 630 | 750 | 15.0 | DN100 | 960 | 35 | 620 | 75 | 1630*1300*980 |
| SV-750 | 750 | 900 | 18.5 | DN100 | 1150 | 35 | 640 | 76 | 1630*1300*980 |
With the increasing demand of vacuum technology in various application fields, the number of rotary vane vacuum pumps is increasing. Because the number of vacuum pumps, processing and equipment is very large, the price is very low, so some foreign vacuum manufacturers in our country set up factories. Domestic small and medium-sized rotary vane vacuum pump technology has passed, the price is much cheaper than foreign pumps, so domestic vacuum pumps still have competitive advantages, the key is to deal with shaft seal leakage and rotary vane data and vacuum pump oil function quality problems, to ensure that direct-connected pumps at high speed, high temperature function stability, reliable operation, together, further improve the domestic rotary vane vacuum pump devaporization ability.
ZJ Roots Vacuum Pump
| Model | ZJ-150 | ZJ-300 | ZJ-600 | ZJ-1200 | |
| Pumping speed（L/s） | 150 | 300 | 600 | 1200 | |
| Ultimate pressure （Pa） |
1stage piston pump as backing pump | 5×10-2 | |||
| 2 stage piston pump as backing pump | 1×10-1 | ||||
| Max. allowable diff. pressure（Pa） | 8×103 | 5×103 | |||
| Motor rotary speed（RPM） | 3000 | ||||
| Suitable motor power（kW） | 2.2 | 4 | 7.5 | 11 | |
| Flange size | Inlet（mm） | 100 | 150 | 200 | 250 |
| outlet（mm） | 100 | 150 | 200 | 200 | |
| Cooling water consumption（L/h） | 120 | 150 | |||
| Allowable temperature（℃） | 100 | ||||
| Vacuum pump oil | 100# | ||||
| Weight(without motor)（kg） | 195 | 250 | 760 | 860 | |
Judging from the production situation of Roots vacuum pump abroad, some large foreign companies account for more than 5% of the international sales of Roots pump, which is not only 20%, but the price of Roots vacuum pump abroad is much higher than that of domestic pumps. At present, there are almost all large or small high vacuum and vacuum systems at home and abroad to shorten the suction time and improve the output power of Roots vacuum pump equipment. Therefore, it is necessary for domestic Roots vacuum pump to successfully enter the international market on the basis of occupying the domestic market. Therefore, it is necessary for us to further reduce the vibration and noise of domestic Roots vacuum pump and thoroughly deal with the leakage of shaft seal. Problems, improvement of quality and improvement of pump internal and external appearance of the completion and cleaning. In addition, even considering that the frequency of power supply in some countries and regions is 60Hz, the Roots vacuum pump can improve its speed under the premise of long-term operation.
At present, the domestic air embedded Roots vacuum pump is developing very fast, and its skills are now sophisticated. Because the pump contains a gas cooler under the exhaust port, and part of the air is cooled through the pipe pump chamber to cool the operation of the rotor, so that the heat of the refrigerator is balanced, so the pump can directly connect the atmosphere. In order to satisfy the different requirements of the limit vacuum pump series, this can be used. Generally, the air embedded Roots vacuum pump is added. The limit vacuum degree of the front pump should reach a high level ratio. Because there is no working medium in the pump room, this kind of pump is actually attributed to the dry pump. Now, in petroleum, chemical industry, plastics, pesticides, there are embedded Roots vacuum pumps and units, dynamic balance of steam turbine rotor, long-term operation of space simulation equipment with testing, so it should be popularized and applied in our country.
FB Hybrid Molecular Pump Turbo Molecular Pump
| Model | unit | FB-600 | FB-1200 | FB-1600 | FB-3600 | ||||
| High vacuum flange | mm | 150CF | 160ISO-K | 200CF | 200ISO-K | 250CF | 250ISO-K | 400 ISO-K | |
| Fore pipe flange | mm | 40 KF | 40 KF | 50 KF | 100 ISO-K | ||||
| Pumping speed | L/s | 600 | 1200 | 1600 | 3600 | ||||
| Compression ration | N2 | >109 | >109 | >109 | >108 | ||||
| H2 | >8×103 | >1×104 | >1×104 | >5×102 | |||||
| Ultimate pressure | Torr | <8×10-8 | <5×10-7 | <8×10-8 | <5×10-7 | <8×10-8 | <5×10-7 | <2×10-6 | |
| Rotary Speed | rpm | 24000 | 24000 | 24000 | 13500 | ||||
| Vibration value | µm | ≤0.1 | ≤0.1 | ≤0.15 | ≤0.15 | ||||
| Start-up time | min | <4.5 | <5 | <6 | <11 | ||||
| Fore pump speed | L/s | 4-8 | 8-15 | 15 | 30-70 | ||||
| Cooling method | / | Air / water | Air / water | Air / water | water | ||||
| Ambient temperature(Air) | ℃ | ≤20 | ≤20 | ≤20 | / | ||||
| Cooling water | temperature | ℃ | ≤35 | ≤35 | ≤35 | ≤25 | |||
| consumption | L/min | 1-2 | 1-2 | 1-2 | 2 | ||||
| Bake-up temperature | ℃ | <120 | <120 | <120 | <120 | ||||
| Heater | Power | Kw | <250 | <300 | <350 | / | |||
| Input voltage | V | AC220 | AC220 | AC220 | / | ||||
| Mounting position | / | Vertical ±5° | Vertical ±5° | Vertical ±5° | Vertical±5° | ||||
| Weight | Kg | 25 | 29 | 31 | 100 | ||||
Molecular pumps replace cryogenic pumps in many foreign semiconductor process occasions, especially sputtering, etching and stacking equipment using composite molecular pumps and traction pumps as the main pumps.
Because the pumping speed and diameter of the molecular pump are only one fourth of the pumping speed of the cryopump, the exhaust time of the molecular pump is longer than that of the cryopump. In order to improve pumping speed, a cryogenic cooling plate, called cryogenic molecular pump, is installed on the import side of the molecular pump. The cryogenic plate gas and other gas molecules are pumped away. The application of this cryogenic molecular pump in vacuum coating equipment has improved both production power and coating quality. With the rapid development of semiconductor industry, film industry and scientific research in China, molecular pumps should concentrate on the development of vacuum pump manufacturing industry in China. Above all, molecular pumps should establish a sound system, and study and develop different composite molecular pumps, traction pumps and cryogenic molecular pumps to meet the needs of different occasions.
LG Series Screw Vacuum Pump
| Model | Unit | LG50 | LG70 | LG100 | LG150 | LG200 | LG300 | LG350 | ||
| Suction Capacity | 50 Hz | m³/hr | 180 | 250 | 360 | 540 | 720 | 1080 | 1260 | |
| 60 Hz | 216 | 300 | 430 | 650 | 850 | 1296 | 1512 | |||
| Ultimate Pressure | 50 Hz | mbar | 0.02 | |||||||
| 60 Hz | 0.01 | |||||||||
| Motor power | 50 Hz | Kw | 5.5 | 7.5 | 11 | 15 | 18.5 | 22 | 22 | |
| 60 Hz | 7.5 | 11 | 15 | 15 | 22 | 26 | 26 | |||
| Rotary Speed | 50 Hz | RPM | 2900 | |||||||
| 60 Hz | 3550 | |||||||||
| Inlet diam | mm | 50 | 65 | 70 | 90 | 100 | 100 | 100 | ||
| Outlet diam | mm | 40 | 40 | 55 | 65 | 65 | 65 | 65 | ||
| Lubricating oil consumption | L | 0.85 | 0.85 | 1.4 | 2 | 2 | 2 | 2 | ||
| Cooling water consumption | L/min | 2.5 | 2.6 | 2.8 | 3 | 4 | 4 | 4 | ||
| gal/min | 0.67 | 0.7 | 0.75 | 0.8 | 1.07 | 1.07 | 1.07 | |||
| Weight | Kg | 295 | 350 | 480 | 520 | 680 | 850 | 850 | ||
| Noise | dB(A) | 68 | 70 | 70 | 72 | 74 | 84 | 84 | ||
| Working temperature | ℃ | 5～40 | ||||||||
| Max. Permissible humidity | / | 90% | ||||||||
Dry vacuum pumps are increasing in foreign countries, mainly driven by the rapid development of semiconductor industry, chemical industry and film industry. In Japan, dry vacuum pump oil-sealed mechanical pumps have been fully used in semiconductor industry, while in Europe and America, more than 45% of dry vacuum pump oil-sealed mechanical pumps have been replaced by semi-conductors, which greatly improves the function and quality of products. In order to satisfy the requirements of different applications and different working conditions, there are multistage Roots vacuum pumps, multistage claw vacuum pumps, screw vacuum pumps and vacuum pumps, reciprocating piston vacuum pumps and turbo oil-free vacuum pumps abroad. Extreme pressure from 10 to 10-2 Pa, from 20 m3/h to 500 m3/h, according to the calculation of pumping speed, the use of domestic dry pumps is still lacking 1%, the domestic semiconductor industry and dry pumps are all imported from abroad, the price is very valuable. Therefore, China should vigorously study and develop dry pumps, so that dry vacuum pumps become a new point of increase in China’s industrial economy.
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