how to choose best vacuum pump for your industry

Vacuum pump products are huge in quantity, large in demand and low in output, but it is indeed an indispensable basic product that directly affects the quality of vacuum equipment function. The market of vacuum pumps varies according to the needs of users. From the rapid development of semiconductor industry and the expansion of dry pump and molecular pump applications, it is the main driving force of market growth. The following EVP vacuum pump manufacturers for you to introduce several commonly used models.how to choose best vacuum pump for your industry

2SK Liquid Ring Vacuum Pump

Model	Suction capacity	Ultimate vacuum	Power	speed	Water supply	Inlet/outlet diam	Water inlet
	m³/min	MPa（G）	KW	r/min	L/min	DN(mm）	(mm)
2SK1.5	1.35	-0.097	4	1440	10-15	40	G1/2”
2SK-3	2.7	-0.098	7.5/11	1440	15-20	40	G1/2”
2SK-6	5.4	-0.098	15	1460	25-35	65	G1/2”
2SK-12	10.8	-0.098	22/30	970	40-50	100	G1/2”
2SK-20	18	-0.098	45	740	60-80	125	G3/4”
2SK-30	27	-0.098

1. Liquid Ring Vacuum Pump

Although liquid ring vacuum pump belongs to rough vacuum pump, it still has a large market in petroleum, chemical industry, electric power, textile, papermaking and pharmaceutical products. In foreign countries, the sales volume of liquid-ring vacuum pump accounts for 14% of the total market, second to dry vacuum pump. Because most of the liquid-ring vacuum pump is castings, processing requirements are not high, and labor-intensive products, the liquid-ring vacuum pump has competitive advantages in price. The key is to improve the design, reduce volume, reduce weight, improve efficiency and reduce energy consumption.

H Piston Vacumm Pump

Model		H-70	H-150	H-180	H-200	H-230	H-300
Pumping speed (L/S)		70	150	180	200	230	300
Ultimate pressure (Pa)		1	1	1	1	1	1
Pump rotary speed (rpm)		500	500	380	410	450	450
Suitable motor	Power (KW)	5.5	15	15	15	18.5	22
	Rotary speed(rpm)	1440	1440	1460	1460	1470	1470
	Model	Y132S-4	Y132M-4	Y160L-4	Y160L-4	Y180M-4	Y180L-4
Max. inlet pressure (Pa)				1.3X104
Max. Vapor Productivity(kg/hr.)				About 8.4
Cooling waterconsumption (kg/h)		150	200	450	450	450	700
Lubricated oil	Model			1# vacuum pump oil
	Capacity (kg)	18	40	45	45	45	63
Dimension	Inlet（mm）	80	100	160	160	160	160
	Outlet（mm）	50	80	100	100	100	100
Length x width x height (mm)		650 X 630 X 1200	1010 X 680 X 1356	1140 X 940 X 1270	1140 X 940 X 1270	1140 X 940 X 1325	1140 X 1160 X 1325
Total weight (kg)		525	970	1155	1155	1155	1525

Model		H-150G	H-150F	H-200F	H-300F
Pumping speed (L/S)		150	150	200	300
Ultimate pressure (Pa)		1	1	1	1
Pump rotary speed (rpm)		500	450	410	450
Suitable motor	Power (KW)	7.5	11	15	22
	Rotary speed(rpm)	1440	1460	1460	1470
	Model	Y132M-4	Y160M-4	Y160L-4	Y180L-4
Max. inlet pressure (Pa)		1.3X104
Max. Vapor Productivity (kg/hr.)		About 8.4
Cooling water consumption (kg/h)		200	200	450	700
Lubricated oil	Model	1# vacuum pump oil
	Capacity (kg)	40	35	55	80
Dimension	Inlet（mm）	100	100	160	160
	Outlet（mm）	80	100	100	100
Length x width x height (mm)		1010 X 680 X 1356	1305 X 825 X 1350	1300 X 925 X 1450	1300 X 1150 X 1465
Total weight (kg)		970	905	1255	1650

2. Rotary piston vacuum pump

Rotary piston pump is an oil seal vacuum pump. Because the rotary piston pump is more useful and reliable, all kinds of vacuum furnaces at home and abroad, drying equipment coating, immersion rotary piston pump is a kind of rotary piston pump front pump, but casting heavy, processing workload is large, so foreign vacuum factories are looking for partners in China. In order to make domestic piston vacuum pumps enter the international market, it is necessary to further reduce the vibration and noise of pumps, prevent leakage and improve the reliability of injection and long-term operation of rotary piston vacuum pumps.

SV Rotary Vane Vacuum Pump

Model	Pump speed(m3/h)		Motor Power(KW)	Inlet Diam (inch)	Rotary speed(rpm)	Oil Capacity(L)	G.W(kg)	NoisedB (A)	Dimensions(mm)
	50HZ	60HZ
SV-010	10	12	0.37 (3ph)0.55 (1ph)	G1/2	1400	0.5	20	64	405*253*210
SV-020	20	24	0.75 (3ph)0.90 (1ph)	G1/2	2800	0.5	20	64	405*253*210
SV-025	25	30	0.75 (3ph)0.90 (1ph)	G1/2	2800	0.5	22	64	405*253*210
SV-040	40	48	1.5 (3ph)2.2 (1ph)	G11/4	1400	1.0	50	67	660*300*270
SV-063	63	75	2.2	G11/4	1400	2.0	83	68	695*420*295
SV-100	100	120	3.0	G11/4	1400	2.0	87	72	735*420*295
SV-160	160	192	4.0	G2	1400	4.5	152	74	805*520*410
SV-200	200	240	5.5	G2	1400	4.5	159	76	825*520*410
SV-250	250	300	7.5	G2	1400	7.0	230	76	1000*550*410
SV-300	300	360	7.5	G2	1400	7.0	236	76	1200*550*410
SV-630	630	750	15.0	DN100	960	35	620	75	1630*1300*980
SV-750	750	900	18.5	DN100	1150	35	640	76	1630*1300*980

3. Rotary vane vacuum pump

With the increasing demand of vacuum technology in various application fields, the number of rotary vane vacuum pumps is increasing. Because the number of vacuum pumps, processing and equipment is very large, the price is very low, so some foreign vacuum manufacturers in our country set up factories. Domestic small and medium-sized rotary vane vacuum pump technology has passed, the price is much cheaper than foreign pumps, so domestic vacuum pumps still have competitive advantages, the key is to deal with shaft seal leakage and rotary vane data and vacuum pump oil function quality problems, to ensure that direct-connected pumps at high speed, high temperature function stability, reliable operation, together, further improve the domestic rotary vane vacuum pump devaporization ability.

ZJ Roots Vacuum Pump

Model		ZJ-150	ZJ-300	ZJ-600	ZJ-1200
Pumping speed（L/s）		150	300	600	1200
Ultimate pressure （Pa）	1stage piston pump as backing pump	5×10-2
	2 stage piston pump as backing pump	1×10-1
Max. allowable diff. pressure（Pa）		8×103		5×103
Motor rotary speed（RPM）		3000
Suitable motor power（kW）		2.2	4	7.5	11
Flange size	Inlet（mm）	100	150	200	250
	outlet（mm）	100	150	200	200
Cooling water consumption（L/h）		120		150
Allowable temperature（℃）		100
Vacuum pump oil		100#
Weight(without motor)（kg）		195	250	760	860

4. Roots Vacuum Pump

Judging from the production situation of Roots vacuum pump abroad, some large foreign companies account for more than 5% of the international sales of Roots pump, which is not only 20%, but the price of Roots vacuum pump abroad is much higher than that of domestic pumps. At present, there are almost all large or small high vacuum and vacuum systems at home and abroad to shorten the suction time and improve the output power of Roots vacuum pump equipment. Therefore, it is necessary for domestic Roots vacuum pump to successfully enter the international market on the basis of occupying the domestic market. Therefore, it is necessary for us to further reduce the vibration and noise of domestic Roots vacuum pump and thoroughly deal with the leakage of shaft seal. Problems, improvement of quality and improvement of pump internal and external appearance of the completion and cleaning. In addition, even considering that the frequency of power supply in some countries and regions is 60Hz, the Roots vacuum pump can improve its speed under the premise of long-term operation.

At present, the domestic air embedded Roots vacuum pump is developing very fast, and its skills are now sophisticated. Because the pump contains a gas cooler under the exhaust port, and part of the air is cooled through the pipe pump chamber to cool the operation of the rotor, so that the heat of the refrigerator is balanced, so the pump can directly connect the atmosphere. In order to satisfy the different requirements of the limit vacuum pump series, this can be used. Generally, the air embedded Roots vacuum pump is added. The limit vacuum degree of the front pump should reach a high level ratio. Because there is no working medium in the pump room, this kind of pump is actually attributed to the dry pump. Now, in petroleum, chemical industry, plastics, pesticides, there are embedded Roots vacuum pumps and units, dynamic balance of steam turbine rotor, long-term operation of space simulation equipment with testing, so it should be popularized and applied in our country.

FB Hybrid Molecular Pump Turbo Molecular Pump

Model		unit	FB-600		FB-1200		FB-1600		FB-3600
High vacuum flange		mm	150CF	160ISO-K	200CF	200ISO-K	250CF	250ISO-K	400 ISO-K
Fore pipe flange		mm	40 KF		40 KF		50 KF		100 ISO-K
Pumping speed		L/s	600		1200		1600		3600
Compression ration		N2	>109		>109		>109		>108
		H2	>8×103		>1×104		>1×104		>5×102
Ultimate pressure		Torr	<8×10-8	<5×10-7	<8×10-8	<5×10-7	<8×10-8	<5×10-7	<2×10-6
Rotary Speed		rpm	24000		24000		24000		13500
Vibration value		µm	≤0.1		≤0.1		≤0.15		≤0.15
Start-up time		min	<4.5		<5		<6		<11
Fore pump speed		L/s	4-8		8-15		15		30-70
Cooling method		/	Air / water		Air / water		Air / water		water
Ambient temperature(Air)		℃	≤20		≤20		≤20		/
Cooling water	temperature	℃	≤35		≤35		≤35		≤25
	consumption	L/min	1-2		1-2		1-2		2
Bake-up temperature		℃	<120		<120		<120		<120
Heater	Power	Kw	<250		<300		<350		/
	Input voltage	V	AC220		AC220		AC220		/
Mounting position		/	Vertical ±5°		Vertical ±5°		Vertical ±5°		Vertical±5°
Weight		Kg	25		29		31		100

5. Molecular pumps

Molecular pumps replace cryogenic pumps in many foreign semiconductor process occasions, especially sputtering, etching and stacking equipment using composite molecular pumps and traction pumps as the main pumps.

Because the pumping speed and diameter of the molecular pump are only one fourth of the pumping speed of the cryopump, the exhaust time of the molecular pump is longer than that of the cryopump. In order to improve pumping speed, a cryogenic cooling plate, called cryogenic molecular pump, is installed on the import side of the molecular pump. The cryogenic plate gas and other gas molecules are pumped away. The application of this cryogenic molecular pump in vacuum coating equipment has improved both production power and coating quality. With the rapid development of semiconductor industry, film industry and scientific research in China, molecular pumps should concentrate on the development of vacuum pump manufacturing industry in China. Above all, molecular pumps should establish a sound system, and study and develop different composite molecular pumps, traction pumps and cryogenic molecular pumps to meet the needs of different occasions.

LG Series Screw Vacuum Pump

Model		Unit	LG50	LG70	LG100	LG150		LG200	LG300	LG350
Suction Capacity	50 Hz	m³/hr	180	250	360	540		720	1080	1260
	60 Hz		216	300	430	650		850	1296	1512
Ultimate Pressure	50 Hz	mbar	0.02
	60 Hz		0.01
Motor power	50 Hz	Kw	5.5	7.5	11	15	18.5		22	22
	60 Hz		7.5	11	15	15	22		26	26
Rotary Speed	50 Hz	RPM	2900
	60 Hz		3550
Inlet diam		mm	50	65	70	90	100		100	100
Outlet diam		mm	40	40	55	65	65		65	65
Lubricating oil consumption		L	0.85	0.85	1.4	2	2		2	2
Cooling water consumption		L/min	2.5	2.6	2.8	3	4		4	4
		gal/min	0.67	0.7	0.75	0.8	1.07		1.07	1.07
Weight		Kg	295	350	480	520	680		850	850
Noise		dB(A)	68	70	70	72	74		84	84
Working temperature		℃	5～40
Max. Permissible humidity		/	90%

6. Dry Vacuum Pump

Dry vacuum pumps are increasing in foreign countries, mainly driven by the rapid development of semiconductor industry, chemical industry and film industry. In Japan, dry vacuum pump oil-sealed mechanical pumps have been fully used in semiconductor industry, while in Europe and America, more than 45% of dry vacuum pump oil-sealed mechanical pumps have been replaced by semi-conductors, which greatly improves the function and quality of products. In order to satisfy the requirements of different applications and different working conditions, there are multistage Roots vacuum pumps, multistage claw vacuum pumps, screw vacuum pumps and vacuum pumps, reciprocating piston vacuum pumps and turbo oil-free vacuum pumps abroad. Extreme pressure from 10 to 10-2 Pa, from 20 m3/h to 500 m3/h, according to the calculation of pumping speed, the use of domestic dry pumps is still lacking 1%, the domestic semiconductor industry and dry pumps are all imported from abroad, the price is very valuable. Therefore, China should vigorously study and develop dry pumps, so that dry vacuum pumps become a new point of increase in China’s industrial economy.

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