Vacuum pumping speed is one of the important factors to determine the working efficiency of vacuum plasma cleaning machine. The dust collection speed is mainly determined by the vacuum pump. When the size of the product to be processed is very large, the vacuum plasma cleaner with large cavity (above 80L) must be used. If only one vacuum pump is used, the vacuum speed will be slow and the time required for vacuum pumping will be very long. Therefore, large cavity vacuum plasma cleaner is usually equipped with a vacuum pump group to improve the vacuum pumping speed. Today we will introduce the types of vacuum pumps used in plasma cleaners and the precautions when selecting vacuum pumps.
The vacuum pump combines two or more vacuum pumps to form a series of structures, which can greatly speed up the vacuum pumping speed. Three types of vacuum pumps are usually used in vacuum plasma cleaner, one is rotary vane vacuum pump and roots pump; the other is dry vacuum pump + roots pump; the last is mechanical pump and molecular pump.
1. Rotary vane vacuum pump + roots pump
Rotary vane vacuum pump and pump group composed of roots pump can also be called oil pump group. The pump group is the most common pump set in our vacuum plasma cleaning machine. It is driven by a rotary vane vacuum pump. Pump, plus roots pump as a combination of two-stage pump. This type of pump unit is usually used in vacuum plasma cleaners, where the cleanliness requirements are not very high and the chamber is very large.
Rotary vane vacuum pump and roots pump are the most common pumps in vacuum plasma cleaning machine. It has many advantages: first of all, it can greatly improve the pumping speed and reduce the vacuum time. The structure is relatively simple and easy to maintain; third, it has cost-effectiveness and price advantage.
2. Dry screw vacuum pump + roots pump
Dry screw vacuum pump and roots pump are combined into a dry pump group. The dry screw vacuum pump is used as the bottom pump and roots pump is used as the auxiliary pump. Because they are composed of dry vacuum pumps, there is no oil pollution and the cleanliness is higher than that of the oil pump set. Dry pump units are usually used in industries with high cleanliness requirements, such as biomedical, semiconductor and aerospace.
Dry pump group has superior performance, with many advantages: first, high cleanliness, avoid oil pollution; second, high vacuum speed, improve work efficiency; third, stable working performance and low sound. Fourth, can deal with the harsh working environment.
3. Mechanical pump + molecular pump
Mechanical pump and molecular pump form a special pump group – molecular pump group. The use of molecular pump group can form a clean ultra-high vacuum environment, so molecular pump unit is usually used in coating machine and etching machine which need high vacuum environment.
Molecular pump group is so powerful, what advantages does it have? First of all, the molecular pump unit starts up quickly, and the pumping speed is very fast. Secondly, the molecular pump group does not use oil, which will not cause oil pollution. Third, the maintenance is simple.
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