Oil free claw vacuum pump in semiconductor industry
Posted on Thu, 21 Nov 2019 05:37:44 +0000
Oil free claw vacuum pump uses claw rotation principle to work. Dry compression, no contact, no wear. Two claw rotors rotate in opposite directions in the pump cylinder to guide and compress the gas medium. This shape of the rotor keeps the tip of the claw and the wall of the pump cylinder, as we...
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