vacuum unit extraction process
Posted on Tue, 22 Sep 2020 06:29:15 +0000
Even if there is no air leakage, there will always be actual (type 3 reflects the pressure variation law of the pump in the process of pumping out the space gas in the vacuum chamber. When the pressure is high, the air leakage and outgassing volume of the system are small relative to the gas volu...
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