Diffusion pump oil return process diagram
Posted on Fri, 22 Jun 2018 08:06:26 +0000
The oil vapor of diffusion pump is completely move radially down the pump chamber. Due to random scattering or directional radiation, some molecules of steam ejected from the nozzle also move toward the pump port. This process we called Backflow. Backflow is the main contamination of diffusion pu...
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